SOD(Spin On Doping)법을 이용한 저가 고효율 태양전지에 관한 연구

A Study of low cost and high efficiency Solar Cell using SOD(spin on doping)

  • 박성현 (성균관대학교 정보통신공학부) ;
  • 김경해 (성균관대학교 정보통신공학부) ;
  • 문상일 (성균관대학교 정보통신공학부) ;
  • 김대원 (성균관대학교 정보통신공학부) ;
  • 이준신 (성균관대학교 정보통신공학부)
  • 발행 : 2002.07.08

초록

High temperature Kermal diffusion from $POCl_3$ source usually used for conventional process through put of a cell manufacturing line and potentially reduce cell efficiency through bulk like time degradation. To fabricate high efficiency solar cells with minimal thermal processing, spin-on-doping(SOD) technique can be employed to emitter diffusion of a silicon solar cell. A technique is presented to emitter doping of a mono-crystalline solar cell using spin-on doping (SOD). Moreover it is shown that the sheet resistance variation with RTA temperature and time fer mono-crystalline and multi-crystalline silicon samples. This novel SOD technique was successfully used to produces 11.3% efficiency l04mm by 104mm size mono-crystalline silicon solar cells.

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