한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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- Pages.1050-1053
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- 2002
광소자 응용을 위한 UV-LIGA 공정 기반의 MEMS 소자 제작
Fabrication of high aspect ratio metallic structures for optical devices using UV-LIGA Process
초록
This paper presents metal structure that is fabricated using UV-LIGA process with PMER N-CA3000. In order to fabricate metal structure with high aspect ratio, the systematic optimization method was adopted and then the structure of