Optical components assembly by AIO bonding method

AIO 에 의한 Glass 광학부품 Bonding

  • Potapov, S. (MEMS Lab., Samsung Advanced Institute of Technology) ;
  • Ku, Janam (MEMS Lab., Samsung Advanced Institute of Technolog) ;
  • Yoon, Eungyeoul (MEMS Lab., Samsung Advanced Institute of Technolog) ;
  • Chang, Donghoon (MEMS Lab., Samsung Advanced Institute of Technology)
  • Published : 2002.07.01

Abstract

Optical elements such as small glass lenses or optical fibers can be permanently bonded to substrates using Al inter-layer by applying Pressure and heating. As an example aspherical lens was bonded on a silicon V-groove. The bonding has high shear strength and good thermal cycling stability.

Keywords