미소 버 형상 측정 방법 개발

Development of Measurement Method for Micro Burr Geometry

Triangulation method, conoscopic holography method and interferometry method are analyzed for effective measurement of micro burr geometry, which is formed in micro drilling. To select proper sensor, cylinder with 0.5mm diameter is measured and the result shows that conoscopic holography method is effective for measuring highly inclined surface. Burr with 1.0mm height and 30$\mu\textrm{m}$ height are measured by all methods. The conoscopic holography method is probed to be most proper method for measuring micro burr. A Program for 3D display of measured burr is developed.