통계적 실험 계획법을 이용한 광학 벤치 설계 규칙의 설정

Optical bench design rule formulated by statistical design of experiment

In order to set up the design rule of micro optical bench, optical coupling efficiencies of two sets of test benches are calculated. Simple linear connections of incoming and outgoing optical fibers with and without ball lenses are designed. Positional errors that are possible in actual fabrication processes are considered in the calculations and their tolerances are determined from 3dB conditions. For a simple fiber-to-fiber connection, the working distance is limited to $2.7\mu\textrm{m}$ and tilt error $5.8^{\circ}$. When ball lenses are located in front of each fiber, the working distance can be extended over $60\mu\textrm{m}$ , but the positional errors have the strong interaction among position parameters and thus should be considered simultaneously for tolerance design.