대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2001년도 추계학술대회 논문집 전기물성,응용부문
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- Pages.103-105
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- 2001
Gas비에 따른 ZnO박막의 압전특성
Characteristics of ZnO Thin film by Gas Ratio
- 발행 : 2001.11.03
초록
ZnO thin films on glass substrate were deposited by RF sputter with various