대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2001년도 추계학술대회 논문집 전기물성,응용부문
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- Pages.62-64
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- 2001
구리 전해도금을 이용한 Air-gap 변화 방식의 Tunable capacitor 제조
Fabricated Tunable Capacitor of Air-gap Variations Using Cu Electroplating
- Lee, Jae-Ho (School of Electronics and Engineering Kyungpook National University) ;
- Seo, Chang-Taeg (School of Electronics and Engineering Kyungpook National University) ;
- Lee, Myoung-Bok (School of Electronics and Engineering Kyungpook National University) ;
- Lee, Jong-Hyun (School of Electronics and Engineering Kyungpook National University)
- 발행 : 2001.11.03
초록
In this paper, we present the fabrication and performance of tunable capacitors with various structural geometry of plates. Experimental devices have been fabricated using Cu-electroplating techniques and standard MEMS techniques. In particular, the thickness of electroplated Cu is designed below
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