대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2001년도 추계학술대회 논문집 전기물성,응용부문
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- Pages.59-61
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- 2001
MEMS용 Si 소재의 온도에 따른 탄성 특성 변화에 관한 연구
A Study on the Elastic Property Change with Temperature in Si Materials for MEMS
- Jung, Sung-Hoon (School of Materials Science and Engineering, Seoul National University) ;
- Lee, Se-Ho (School of Materials Science and Engineering, Seoul National University) ;
- Lee, Sung-Hun (School of Materials Science and Engineering, Seoul National University) ;
- Kwon, Dong-Il (School of Materials Science and Engineering, Seoul National University)
- 발행 : 2001.11.03
초록
Electrostatically actuated test devices were designed to evaluate the elastic modulus of single crystalline Si (100) materials for MEMS device. Elastic modolus was calculated from resonant frequency by applying Rayleigh's energy method. Temperature effect on elastic properties was evaluated by detecting the resonant frequency change with increasing temperature to
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