한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2001년도 하계학술대회 논문집
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- Pages.29-32
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- 2001
수소 Passivation에 따른 실리콘 나노결정 박막의 광학적 특성 변화 연구
Effect of Hydrogen Passivation on the Photoluminescence of Si Nanocrystallites Thin Flms
초록
Hydrogen passivation of Si nanocrystals identifies luminescence mechanism indirectly. Si nanocrystallites thin films on p-type (100) Si substrate have been fabricated by pulsed laser deposition technique using a Nd:YAG laser After deposition, Si nanocrystallites thin films have been annealed at 600