한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2001년도 춘계학술대회 논문집
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- Pages.865-868
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- 2001
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- 2005-8446(pISSN)
Latch-up 특성을 갖는 평면형의 열구동 마이크로 액츄에이터
A thermoelastic microactuator with planar latch-up operation
초록
We designed and fabricated a planner-type thermoelastic microactuator with a latch-up operation for optical switching. Latch-up actuation is prerequisite to implement an optical switch with low power consumption and high reliability. The proposed microactuator consists of four cantilever-shaped thermal actuators, four displacement linkages, two shallow arch-shaped leaf springs, a mobile shuttle mass with a micromirror, and four elastic boundaries. The structural layer of the planar microactuator is phosphorous-doped 12