대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2001년도 하계학술대회 논문집 C
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- Pages.1375-1377
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- 2001
고압용 압력센서의 제작과 그 특성
Fabrication and Characteristics of pressure sensors for high pressure
- Choi, Sung-Kyu (Electronic Eng. Yungnam univ) ;
- Seo, Jeong-Hwan (Electronic Eng. Pukyung univ) ;
- Chung, Gwiy-Sang (school of information and system)
- 발행 : 2001.07.18
초록
This paper describes the fabrication and characteristics of CrN thin-film type pessure sensors, in which the sensing elements were deposited on SUS. 630 diaphragm by DC reactive magnetron sputtering in an argon-nitride atmosphere(Ar-(10%)
키워드