대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2001년도 하계학술대회 논문집 C
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- Pages.1378-1380
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- 2001
오옴성 접합에서의 낮은 접촉 저항을 갖는 Pt/Ti/P형 4H-SiC
Low resistivity ohmic Pt/Ti contacts to p-type 4H-SiC
- 이주헌 (순천향대학교 정보기술공학부) ;
- 양성준 (순천향대학교 정보기술공학부) ;
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김창교
(순천향대학교 정보기술공학부) ;
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조남인
(선문대학교 전자공학과) ;
- 정경화 (선문대학교 전자공학과) ;
- 신명섭 (선문대학교 전자공학과)
- Lee, J.H. (Information Technology Engineering, Soonchunhyang University) ;
- Yang, S.J. (Information Technology Engineering, Soonchunhyang University) ;
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Kim, C.K.
(Information Technology Engineering, Soonchunhyang University) ;
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Cho, N.I.
(Electronic Engineering, Sun Moon University) ;
- Jung, K.H. (Electronic Engineering, Sun Moon University) ;
- Shin, M.S. (Electronic Engineering, Sun Moon University)
- 발행 : 2001.07.18
초록
Ohmic contacts have been fabricated on p-type 4H-SiC using Pt/Ti. Low resistivitf Ohmic contacts of Pt/Ti to p-type 4H-SiC were investigated. Specific contact resistances were measured using the transmission line model method, and the physical properties of the contacts were examined using x-ray diffraction, scanning electron microscopy. Ohmic behavior with linear current-voltage characteristics was observed following anneals at
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