대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2001년도 하계학술대회 논문집 C
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- Pages.1372-1374
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- 2001
실리콘 박막 멤브레인상에 제작된 금속박막형 압력센서의 특성
Characteristics of metal thin-film pressure sensors by on silicon thin-film mer
- Choi, Sung-Kyu (Electronic Eng. Yungnam univ) ;
- Nam, Hyo-Duk (Electronic Eng. Yungnam univ) ;
- Chung, Gwiy-Sang (School of information and system Eng. Dongseo univ)
- 발행 : 2001.07.18
초록
This paper describes fabrication and characteristics of metal thin-film pressure sensor for working at high temperature. The proposed pressure sensor consists of a chrom thin-film, patterned on a Wheatstone bridge configuration, sputter-deposited onto thermally oxidized Si membranes with an aluminium interconnection layer. The fabricated pressure sensor presents a low temperature coefficient of resistance, high-sensitivity, low non-linearity and excellent temperature stability. The sensitivity is 1.097
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