Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2000.05a
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- Pages.959-962
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- 2000
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- 2005-8446(pISSN)
Development of Micro Tool using High Speed Etching Process
고속 회전에칭을 이용한 미세공구의 개발
Abstract
In this study, the micro shaft was fabricated by high speed etching process. The integration of the kinetic energy of circumference and the effect of etching takes less time to fabricate the micro shaft than any other conventional methods. First, the end part of the rod(SKD11) was dipped in chemical solution(FeCl
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