한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2000년도 춘계학술대회 논문집
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- Pages.668-671
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- 2000
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- 2005-8446(pISSN)
공기베어링 스테이지의 이송특성 연구
A Study on the Positioning Characteristic of Aerostatic Stage
초록
An aerostatic stage has frictionless behavior, so it has a advantage of investigation into driven mechanism such as ballscrew. In this paper, fur investigating positioning characteristic of ballscrew and feedback device in aerostatic stage, we compare the positioning characteristic between full-closed(laser scale) and semi-closed(encoder) system. Experimental results show that the aerostatic stage has a 10nm micro step response and repeatability is improved up to 1.00
키워드