Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Evaluation of polarization and mobile charge in ferroelectric films using TVS(Triangular Voltage Sweep) method

삼각전압소인법을 이용한 강유전체 박막내에서의 분극 및 유동이온에 대한 평가

  • 김용성 (청주대학교 일반대학원 전자공학과) ;
  • 이남열 (청주대학교 일반대학원 전자공학과) ;
  • 정순원 (청주대학교 일반대학원 전자공학과) ;
  • 김진규 (청주대학교 일반대학원 전자공학과) ;
  • 정상현 (청주대학교 일반대학원 전자공학과) ;
  • 김광호 (청주대학교 전자·정보통신·반도체공학부) ;
  • 유병곤 (한국전자통신연구원) ;
  • 이원재 (한국전자통신연구원) ;
  • 유인구 (한국전자통신연구원)
  • Published : 2000.07.01
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Abstract

The detection technique both the polarization and the mobile charge density at the same time in ferroelectric films on Si using TVS method have been proposed. This method yields a polarizable and an ionic displacement current peaks whose areas are proportional to the total polarization reversal charge and the total moble ionic space charge, respectively. The calculated polarization and the mobile charge density were 0.42 [$\mu$C/$\textrm{cm}^2$] and 5.5$\times$10$^{11}$ (ions/$\textrm{cm}^2$) in the SBT film of MFIS structure measured at 25$0^{\circ}C$, and 1.4 [$\mu$C/$\textrm{cm}^2$] in the LiNbO$_3$ film of MFS structure measured at 30$0^{\circ}C$, respectively.

Keywords