Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2000.07a
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- Pages.86-89
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- 2000
Evaluation of polarization and mobile charge in ferroelectric films using TVS(Triangular Voltage Sweep) method
삼각전압소인법을 이용한 강유전체 박막내에서의 분극 및 유동이온에 대한 평가
Abstract
The detection technique both the polarization and the mobile charge density at the same time in ferroelectric films on Si using TVS method have been proposed. This method yields a polarizable and an ionic displacement current peaks whose areas are proportional to the total polarization reversal charge and the total moble ionic space charge, respectively. The calculated polarization and the mobile charge density were 0.42 [
Keywords
- TVS(Triangular Voltage Sweep) method;
- ferroelectric-gate structure;
- MFIS structure;
- MFS structure;
- polarization;
- mobile ionic charge density;
- MFSFET