한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2000년도 추계학술대회 논문집
- /
- Pages.783-786
- /
- 2000
- /
- 2005-8446(pISSN)
형상수정 폴리싱에 관한 기초연구
Basic Studies on Corrective Polishing
Abstract
For the development of a ultra-precision CMC polishing system including on-machine measurement system, we study a corrective polishing algorithm. We calculated unit removal profiles for various polishing tools and polishing tool positions. Using these results we simulate the corrective polishing process based on dwell time control. We calculate dwell time distributions and residual error of the polishing simulation method and the FFT calculation method. We got good dwell time distributions and small residual when we used the FFT calculation method. This results will be used for the optimization of corrective polishing process.
Keywords