한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2000년도 추계학술대회 논문집
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- Pages.51-54
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- 2000
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- 2005-8446(pISSN)
공초점 원리를 이용한 표면 현상 측정
Surface measurement using Confocal principle
초록
The traditional surface measuring method using confocal principle requires much time to measure an object surface since it is a scanning tool. In this paper, the upgraded confocal microscope is introduced. It is also a scanning tool but it requires 2D-scanning while the traditional one requires 3D-scanning. It means the time for measuring is considerably reduced. In addition, the measuring system is configured to increase the efficiency of beam. He-Ne laser whose frequency is 632.8nm is used for the laser source. An example of measuring result through the upgraded confocal microscope is showed.
키워드