미세 트랙킹을 위한 마이크로미러 액튜에이터의 구동 특성

ACTUATION CHARACTERISTICS OF A MICROMIRROR FOR FINE-TRACKING

A micromirror actuated by piezoelectric unimorph cantilevers is proposed as a tine-tracking device for high-density optical data storage. Bending motions of the metal/PZT/metal unimorphs translate an integrated micromirror along the out-of-plane vertical direction. The micromirror alters the optical path of the incident laser beam and linearly steers the reflected laser beam by its out-of-plane parallel actuation. Numerical analysis shows that the actuated micromirror can satisfy the tracking speed imposed by the requirement on the access time for the high-density optical data storage up to few tens Gbitlin2 owing to the light mass of the micromirror. In this paper, preliminary characteristics of the micro-machined PZT actuated micromirror (PAM) are reported. Only a 360 nm-thick PZT film deposited by sol-gel process shows both good electrical and mechanical characteristics for the fine-tracking actuator. The micromirror can be easily actuated up to several micrometers under low voltage operation condition well below 10 volts.