한국공작기계학회:학술대회논문집 (Proceedings of the Korean Society of Machine Tool Engineers Conference)
- 한국공작기계학회 1999년도 추계학술대회 논문집 - 한국공작기계학회
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- Pages.525-529
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- 1999
원뿔형 드럼을 이용한 화학기계적 연마기의 개발
Development of Chemical Mechanical Polishing machine by Conical Drum
초록
A cone shape drum polisher was developed to make up for the demerits of conventional CMP apparatus. The developed equipment has several superiorities. First of all, it can achieve uniform velocity profile on all the contact line because of its shape and easy to control the amount of slurry at the position of use. The whole area of wafer surface is exposed to the visual area except the contact line between wafer and drum, hence we can detect polishing end point more easily than any other polishing equipments. Also it has additional merits such as small foot print and polishing load. Polishing characteristics were investigated by developed equipment.
키워드