• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1999.10a
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• pp.525-529
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• 1999

A cone shape drum polisher was developed to make up for the demerits of conventional CMP apparatus. The developed equipment has several superiorities. First of all, it can achieve uniform velocity profile on all the contact line because of its shape and easy to control the amount of slurry at the position of use. The whole area of wafer surface is exposed to the visual area except the contact line between wafer and drum, hence we can detect polishing end point more easily than any other polishing equipments. Also it has additional merits such as small foot print and polishing load. Polishing characteristics were investigated by developed equipment.

• The Journal of The Korea Institute of Intelligent Transport Systems
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• v.22 no.5
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• pp.163-181
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• 2023

Improving the detection performance of facilities corresponding to the sensors of autonomous vehicles helps driving safety. In the road and transportation field, research is being conducted to improve the detection performance of sensors by road infrastructure or facilities. As part of this on the development of autonomous driving support infrastructure, the shape of traffic cones and drums to ensure sufficient LiDAR detection performance even rainy conditions and maintain the line-of-sight guidance function in construction zones improvement effect. The principle was to increase reflection performance and ensure no significant difference in shape from existing facilities. Traffic cones were manufactured in square pyramid shapes instead of cones, and drums were manufactured in hexagonal and octagonal pillar shapes instead of cylinders. LiDAR detection data for the facility was confirmed on a clear day and with 20 mm/h and 40 mm/h rainfall. The detection performance of the square pyramid-shaped traffic cone and octagonal column-shaped drum was to the existing facility. On the other hand, deviations occurred due to repeated measurements, and significance could not be confirmed through statistical analysis. By reflecting these results, future studies will seek a form in which data can be obtained uniformly despite the diversity of measurement environments.