마이크로머시닝 기술에 의해 형성된 막에 있어서의 잔류응력 추정

Estimation of residual stress in micromachined films

A new method of measuring residual stresses in micromachined films using beam or ring structures is proposed. Using the proposed method, more exact value of residual stress can be obtained without any ambiguities in conventional buckling method. Theoretical modeling with respect to this method is described, and experiment is performed. The structure and fabrication process in this paper are simple and widely used in surface micromachining. Therefore, it is possible to obtain a synchronous measurement. A synchronous and reason -able estimation of residual stresses in micromachined films enables us to obtain the prediction of more exact performance in micromachined devices.