대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

방전시간에 따른 MgO 표면층의 변화에 관한 연구

A study on the surface change of MgO by discharge in AC PDP

  • Ji, S.W. (Dept. of Electrical Eng. Pusan National University) ;
  • Yeo, J.Y. (Dept. of Electrical Eng. Pusan National University) ;
  • Kim, D.H. (Dept. of Electrical Eng. Pusan National University) ;
  • Park, C.H. (Dept. of Electrical Eng. Pusan National University) ;
  • Cho, J.S. (Dept. of Electrical Eng. Pusan National University)
  • 발행 : 1998.07.20
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초록

One of the most important problems in the development of AC PDP is to make long life and more stable panels. It is well known that the life time of a panel strongly depends on the sputtering-resistant property of the protecting layer such as MgO. However, the sputtering rate is so low that it is very difficult to measure the sputtering-resistant property of MgO. This paper describes a high speed measurement technique to test the sputtering-resistant property of MgO thin film by the R.F. magnetron sputtering. In this case the MgO sample has been used as a target of sputtering process. Moreover, the MgO surface changed by ion-bombarding sputtering are also discussed with SEM photoes.

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