대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1998년도 하계학술대회 논문집 G
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- Pages.2509-2511
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- 1998
센서용 piezoelectric film의 형성 및 특성 평가에 대한 연구
Studies on Formation of Piezoelectric Film for Sensor and its Characteristic Estimation
- Lee, Sung-Jun (Dept. of Electrical Engineering, The University of Seoul) ;
- Kim, Chul-Ju (Dept. of Electrical Engineering, The University of Seoul)
- 발행 : 1998.07.20
초록
In this study, we formed the piezoelectric film and estimated its characteristics for sensor application. The
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