대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

고온용 3차원 실리콘 가속도센서

Three Dimensional Silicon Accelerometer for High Temperature Range

  • 손미정 (영남대학교 전기전자공학부) ;
  • 서희돈 (영남대학교 전기전자공학부)
  • Son, Mi-Jung (School of Electrical & Electronics Engineering, Yeungnam University) ;
  • Seo, Hee-Don (School of Electrical & Electronics Engineering, Yeungnam University)
  • 발행 : 1998.07.20
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초록

In this paper, we propose the new detecting method for three dimensional piezoresistive silicon accelerometer. Furthermore the accelerometer is formed to have endurance for high temperature by perfect isolation of the piezoresistors using Silicon On Insulator(SOI) wafer. Sensor size are optimized with analytical formulae and extended with FEM simulation for the more detailed results. The accelerometer was fabricated by bulk micromachining techonology. We measured the temperature characteristics and the output characteristics, and the both characteristics were compared with the simulated results

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