• Title/Summary/Keyword: 시준빔

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A Study on Confocal Microscope for A Precise 3-Dimensional Surface Measurement (물체표면의 3차원 정밀형상측정을 위한 공초점 현미경에 관한 연구)

  • 송대호;안중근;강영준;채희창
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1997.10a
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    • pp.233-236
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    • 1997
  • In modem industry, the accuracy and the surface-finish requirements for machined parts have been becoming ever more stringent. Optical method in measurements is playing an important role in vibration measurement, crack and defect detection and surface topography with the advent of opto-mechatronics. In this study, the principle of the general confocal microscope is introduced for surface measurement, and the advanced confocal microscope that has better measuring speed than the traditional confocal microscope is developed. A study on improving the resolution of the advanced confocal microscope is followed. Finally, Software for data acquisition and analysis of various parameters in surface geometrical features has been developed.

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The Analysis on the Error of Diverging Beam and Cylindrical Surface in Holographic Interferometer for Measuring out-of-plane Displacement. (면외변위 측정을 위한 홀로그래피 간섭게에서 발산빔과 원통표면에 대한 오차해석)

  • Kang, Young-June;Moon, Sang-Joon
    • Journal of the Korean Society for Precision Engineering
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    • v.14 no.6
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    • pp.128-134
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    • 1997
  • Holographic interferometry is a useful whole-field nondestructive tesing method for measuring deformations and vibrations of engineering structure. In practical way most holographic interferometer uses a diverging beam, a point light source. When an oject is relatively small, the optical arrangement using a collimated light source has no difficulty technically but for a large object the collimated beam connot be applied anymore practically. In this paper we calculate the error of measured displacement from the sensi- tivity vector dominated by the geometry of optical arrangement for holographic interferometer and show the result with 2-D plots. A plane surface and a cylindrical surface were chosen as objects to be measured and the results from the cases of a diverging and a collimated beams were compared and analyzed.

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