한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 1995년도 추계학술대회 논문집
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- Pages.75-78
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- 1995
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- 2005-8446(pISSN)
레이져를 이용한 3차원 형상가공에 관한 연구
Laser application in 3-D micromachining
초록
This paper presents the feasibility of laser ablation process in 3-D micro machining of MEMS (micro Electro Mechanical System)parts. The micro machining characteristics of polymer(Energy fluence, pulse repetition rate, number of pulse, ablation rate)are investigated and 3-D micro machined samples are demonstrated.
키워드