Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1992.07b
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- Pages.809-812
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- 1992
The Etching Characteristics of $MoSi_2$ film by ECR Etch
ECR Etch 에 의한 $MoSi_2$ 막의 식각 특성
- Lee, H.S. (Department of Electrical Eng. Korea University) ;
- Kang, H.B. (Department of Electrical Eng. Korea University) ;
- Park, G.S. (Department of Electrical Eng. Korea University) ;
- Lee, C.J. (Department of Electrical Eng. Korea University) ;
- Sung, Y.K. (Department of Electrical Eng. Korea University)
- Published : 1992.07.23
Abstract
Charateristics of the ECR etch were Investigated about
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