A suggestion of the SOI MOSFET device with buried island structure

매몰된 island 구조를 갖는 SOI MOSFET 소자의 제안

This paper describes a buried-island SOI MOSFET structure which can reduce the edge channel effect by improving the interface properties at the side wall of active island and by reducing the strength of electric field applied at the upper corner of the side wall from the gate. Also, the buried-island SOl structure can obtain the uniform thickness of SOl film. The buried-island structure can be achieved by Zone- Melting-Recrystallization of polysilicon and polishing. Both simulated and experimental results show that the buried-island SOl NMOSFET has less edge channel effect than the conventional SOl NMOSFET using LOCOS or mesa isolation technique.