저전압 VDMOS 의 ON-저항 모델링

An Advanced On-Resistance Model for Low Voltage VDMOS

  • 발행 : 1991.07.18

초록

An advanced on-resistance model of VDMOS devices in the low voltage regime is proposed and verified by 2-D device simulations. The model considers the lateral gaussian doping profiles in the channel region and exact current spreading angles in the epitaxial layer for both linear and cellular geometries by employing the conformal mapping. It is found out that the on-resistance of low voltage VDMOS may be overestimated considerably if it is analyzed by the conventional method. The 2-D device simulation results show that the proposed model is valid for all ranges of cell spacings and breakdown voltages.

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