Reproducible fabrication of diffraction gratings using holographic exposure system

홀로그래픽 간섭 노광계를 이용한 회절격자 제작의 재현성 향상

A simple fabrication technique of diffraction gratings with short periods is presented. We can see that the monitoring of diffracted light from photoresist gratings during the development process provides optimum conditions for exposure and development processes. With this technique reproducibility and high quality of diffraction gratings is expected.