Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1987.07a
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- Pages.450-453
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- 1987
Interface state density of PECVD ammonia-free SiN
PECVD ammonia-free SiN 막의 계면상태
- Oh, Jae-Ha (Korea University) ;
- Park, Young-Woo (Korea University) ;
- Sung, Young-Kwon (Korea University)
- Published : 1987.07.03
Abstract
Keywords