• 제목/요약/키워드: x-ray photoelectron

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고전압 방전 플라즈마에 의한 질화탄소 박막 층착 시 레이저 애블레이션 효과 (Effect of a Laser Ablation for Carbon Nitride Film Deposition)

  • 김종일
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집
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    • pp.240-243
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    • 2002
  • Carbon nitride films have been deposited on Si(100) substrate by a high voltage discharge plasma combined with laser ablation in a nitrogen atmosphere. The films were grown both with and without the Presence of an assisting focused Nd:YAG laser ablation. The laser ablation of the graphite target leads to vapor Plume plasma expending into the ambient nitrogen arc discharge area. X-ray photoelectron spectroscopy and Auger electron spectroscopy were used to identify the binding structure and the content of the nitrogen species in the deposited films. The surface morphology of the films was studied using a scanning electron microscopy Data of infrared spectroscopy and x-ray photoelectron spectroscopy indicate the existence of carbon-nitrogen bonds in the films. The x-ray diffraction measurements have also been taken to characterize the crystal properties of the obtain films.

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이온빔을 조사한 폴리스타일렌 기판에서의 액정의 배향특성 (Investigation of Liquid Crystal Alignment on ion beam exposed polystyrene surface)

  • 황현석;이종덕;노정규;한정민
    • 한국위성정보통신학회논문지
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    • 제9권1호
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    • pp.33-37
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    • 2014
  • 본 연구에서는 이온빔을 조사한 폴리스타일렌 기판에 일정강도의 이온빔을 조사한 경우에 발생되는 액정배향의 특성에 대해서 연구하였다. 폴리스타일렌은 기계적강도 및 절연성에서 액정표시소자의 배향막으로 사용되는 폴리이미드 계열의 대체 물질로서 주목받고 있으며, 특히 비접촉 배향에서의 가능성이 새롭게 평가되고 있는 소재이다. 이온빔을 조사하여 이방성을 발생시킨 박막의 표면에서의 액정배향상태를 편광현미경으로 관찰하고, 액정배향에 기여한 메커니즘의 규명을 위해서 XPS(X-ray photoelectron spetroscopy) 분석을 사용하였다. 분석한 결과 15초까지의 이온빔 조사는 액정의 배향을 유발하는 중요한 원인으로 작용함을 알 수 있었으며, 이온빔조사에 의한 액정의 배향방법은 고온안정성도 겸비하고 있는 것을 실험을 통해서 알 수 있었다.

용액연소법으로 제조한 LaFeO3의 XPS 특성 (X-ray Photoelectron Spectroscopy Study of LaFeO3 Powders Synthesized by Solution Combustion)

  • 황연;강대식;박미혜;조성백
    • 한국재료학회지
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    • 제18권6호
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    • pp.313-317
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    • 2008
  • [ $LaFeO_3$ ] powders were synthesized using a method involving solution combustion, and the surface properties of these powders were examined by x-ray photoelectron spectroscopy. As the amount of fuel increased during the synthesis, the $LaFeO_3$ powders became amorphous with a large plate-like shape. It was found that the O 1s spectra were composed of two types of photoelectrons by deconvolutioning the spectra. Photoelectrons with higher binding energy come from adsorbed oxygen ($O^-$) whereas those with lower energy come from lattice oxygen ($O^{2-}$). The ratio of adsorbed and lattice oxygen increased as the ratio of the fuel and nitrate (${\Phi}$) increased. The binding energy of both types of oxygen increased as ${\Phi}$ increased due to the formation of carbonates.

방사광을 이용한 표면분석 기술: XPS

  • 박용섭
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.80-80
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    • 2012
  • 본 튜토리알에서는 표면 및 물질분석 기술로 널리 사용되고 있는 X-ray 광전자분광기술(X-ray Photoelectron Spectroscopy)의 원리와 광전자분광계를 구성하는 요소, 그리고 XPS를 이용하여 시료로부터 얻어낼 수 있는 정보가 무엇인지 등에 대해서 알아본다.

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절개된 GaAs(110) 면의 XPD 분석 (XPD Analysis on the Cleaved GaAs(110) Surface)

  • 이덕형;정재관;오세정
    • 한국진공학회지
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    • 제2권2호
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    • pp.171-180
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    • 1993
  • X-선 광전자 분광법(XPD)을 이용하여 GaAs(110) 절개면의 결정구조를 이해하였다. 각분해 X-선 분광법으로 GaAs(110) 면의 내각준위 Ga 및 As 3d의 스펙트럼을 얻어, 이 내각 준위의 세기 비율(intensity ratio)의 방위각과 편각에 따른 변화를 SSC(Single Scattering Cluster) 모델에서 얻은 회절패턴으로 곡선분석(fitting)하여 절개면의 재구성 구조(reconstruction geometry)를 얻었다. 이 절개면의 재구성된 값은 다른 실험의 결과와 비슷하였다.

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Structural and component characterization of the B4C neutron conversion layer deposited by magnetron sputtering

  • Jingtao Zhu;Yang Liu;Jianrong Zhou;Zehua Yang;Hangyu Zhu;Xiaojuan Zhou;Jinhao Tan;Mingqi Cui;Zhijia Sun
    • Nuclear Engineering and Technology
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    • 제55권9호
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    • pp.3121-3125
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    • 2023
  • Neutron conversion detectors that use 10B-enriched boron carbide are feasible alternatives to 3He-based detectors. We prepared boron carbide films at micron-scale thickness using direct-current magnetron sputtering. The structural characteristics of natural B4C films, including density, roughness, crystallization, and purity, were analyzed using grazing incidence X-ray reflectivity, X-ray diffraction, X-ray photoelectron spectroscopy, time-of-flight secondary ion mass spectrometry, and scanning electron microscopy. A beam profile test was conducted to verify the practicality of the 10B-enriched B4C neutron conversion layer. A clear profile indicated the high quality of the neutron conversion of the boron carbide layer.

The Effects of Ar-ion Bombardment and Annealing of D2O/Zircaloy-4 Surfaces Using XPS and UPS

  • Oh, Kyung-Sun;Kang, Yong-Cheol
    • Bulletin of the Korean Chemical Society
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    • 제28권8호
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    • pp.1341-1345
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    • 2007
  • The surface chemistry of D2O dosed Zircaloy-4 (Zry-4) surface followed by Ar-ion bombardment and annealing was studied by means of X-ray photoelectron spectroscopy (XPS) and Ultraviolet photoelectron spectroscopy (UPS). In the XPS study, Ar-ion bombardment caused decrease of the oxygen on the surface region of Zry-4 and therefore led to change the oxidation states of the zirconium from oxide to metallic form. In addition, oxidation states of zirconium were changed to lower oxidation states of zirconium due to depopulation of oxygen on the surface region by annealing. Up to about 787 K, the bulk oxygen diffused out to the subsurface region and after this temperature, the oxygen on the surface of Zry-4 was depopulated. UPS study showed that the valence band spectrum of the D2O exposed Zry-4 exhibited a dominant peak at around 13 eV and no clear Fermi edge was detected. After stepwise Ar+ sputtering processes, the decrease of the oxygen on the surface of Zry-4 led to suppress the dominant peak around 13 eV, the peak around 9 eV and develop a new peak of the metallic Zr 4d state (20.5-21.0 eV) at the Fermi level.