• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.02a
• /
• pp.141-141
• /
• 2012

X-선 반사율 측정법(XRR)은 비파괴적인 측정방법과 수 nm의 두께를 정밀하게 측정할 수 있는 장점으로 인하여 반도체 산업현장에서 많은 관심과 연구가 이루어지고 있다. 이러한 XRR은 두께 분석 측정의 정밀도를 향상시키고 부정확한 결과를 방지하기 위하여 측정기기를 검증하고 보정할 수 있는 두께 표준물질을 필요로 하고 있다. 본 연구에서는 XRR용 두께 표준물질을 이온빔 스퍼터링 증착방법을 이용하여 제작하였다. 두께 표준물질 제작에 있어 공기 중 노출에 의해 산화가 되지 않는 산화물 박막과 산화물 기판을 선택하였다. 후보물질은 glass, sapphire, quartz, SiO2기판과 HfO2, Ta2O5, Cr2O3 산화물 타켓을 이용하여 박막을 제작하였다. 제작된 후 보물질은 교정된 XRR을 통하여 박막의 두께, 계면 및 표면 거칠기, 밀도등 박막의 구조특성분석을 하였다. Glass, quartz의 경우 기판 표면 거칠기가 좋지 않아 제작된 샘플의 X-선 반사율 곡선이 급격히 떨어지면서 측정되는 각도의 영역이 작아졌다. Sapphire로 제작한 시편은 측정된 데이터와 simulation의 curve fitting이 양호하지 않았다. 이 중 SiO2기판을 사용하고 HfO2박막을 증착한 샘플이 다른 후보물질보다 XRR curve fitting 결과가 가장 양호하여 두께 표준물질로 응용하기에 적절하였다. 그리고 AFM (Atomic Force MicroScope)을 이용하여 기판의 거칠기 및 증착한 박막표면 거칠기 측정을 하였고, TEM (Transmission Electron Microscope)으로 두께 측정을 하여 XRR로 얻은 데이터와 비교하였다. 이러한 결과를 토대로 XRR용 두께 표준물질 제작할 수 있었고, 추후 불확도 평가 및 비교실험을 통하여 제작된 XRR용 두께 표준물질을 이용할 수 있을 것으로 기대된다.

• Polymer Science and Technology
• /
• v.8 no.5
• /
• pp.663-671
• /
• 1997

• Proceedings of the Korean Vacuum Society Conference
• /
• 2010.02a
• /
• pp.199-199
• /
• 2010

XRR(X-ray reflectometry)은 나노 스케일 박막의 두께를 측정하는 유망한 도구로 인식되고 있고, XRR측정 결과의 신뢰성을 향상시키기 위하여 많은 연구가 이루어지고 있다. 본 연구에서는 나노 스케일 박막 두께의 정확한 측정을 위해 Si기판 위에 성장시킨 $HfO_2$, $Al_2O_3$, $Ta_2O_5$의 산화물 박막에 대하여 여러 가지 전처리 조건을 변화시켜 조건에 따른 반사율 곡선의 변화와 분석 결과를 살펴보았다. 샘플의 전처리에는 acetone, sulfuric acid, methanol, 초음파세척기를 이용하였고, 전처리가 끝난 후 샘플에 남아있는 수분기를 제거하기 위하여 약 $150^{\circ}C$의 온도로 가열 후 측정비교 분석하였다. 전처리 시 solution과 시간 등의 전처리 조건이 변화함에 따라 X-선 반사율 곡선의 변화가 있음을 알 수 있었고, 이에 따라 XRR 측정 분석 시 두께에 영향을 받았으며, TEM과 XPS를 이용하여 전처리 영향에 대하여 비교 분석 하였다. 이번 연구를 통하여 전처리 방법에 따라 XRR 측정에 정확성을 향상 시킬 수 있는 있는 것으로 보여진다.

• Korean Journal of Optics and Photonics
• /
• v.6 no.3
• /
• pp.188-200
• /
• 1995

A design of unit magnification 2-mirror system with high resolution is presented. It is for soft X-ray(wavelength of 13 nm) projection imaging and suitable for preparation of high density semiconductor chip. In general, a holosymmetric system with unit magnification has the advantage that both coma and distortion are completely eliminated. In our holosymmetric 2-mirror system, spherical aberration is addtionally removed by using two identical paraboloidal mirror surfaces and field curvature aberration is also corrected by balancing Petzval sum and astigmatism which depends on the distance between two mirrors, so that the system is a aplanatic flat-field paraboloidal 2-mirror holosymmetric system. This 2-mirror system is small in size, and has a simple configuration with rotational symmetry about optical axis, and has also small central obscuration. Residual finite aberrations, spot diagrams, and diffraction-based MTF's are analyzed for the check of performances as soft X-ray lithography projection system. As a result, the image sizes for the resolutions of$0.25\mum$and $0.18\mum$are 4.0 mm, 2.5 mm respectively, and depths of focus for those are $2.5\mum$, $2.4\mum$respectively. This system should be useful in the fabrication of 256 Mega DRAM or 1 Giga DRAM. DRAM.

• Journal of the Korean Vacuum Society
• /
• v.7 no.3
• /
• pp.237-241
• /
• 1998

The growth orientation and the surface roughness of AIN/Si(111) films grown by radio frequency (RF) reactive magnetron sputtering were investigated using in-situ x-ray scattering technique and atomic force microscopy (AFM). AIN films were initially grown with the <001> preferred growth orientation under most growth conditions. As the film gets thicker, however, the growth orientation changes significantly, especially at high substrate temperature and high RF powers. We attribute the observed behavior to the competition between the surface energy that prefers the <001> growth orientation and the strain energy that randomizes the growth orientation. In addition, we investigated the evolution of the surface morphology during the growth using the x-ray reflectivity measurement.

• Journal of the Mineralogical Society of Korea
• /
• v.23 no.4
• /
• pp.305-313
• /
• 2010

Mineralogical characteristics of Cu-Co ores from the Central African Copperbelt in the Democratic Repblic of Congo are studied using powder X-ray diffractometer, general area detector X-ray diffractometer, and electron proble microanalyzer. Black ores are mainly composed of heterogenite (cobalt oxide/hydroxide mineral) and malachite (copper carbonate mineral), whereas green ores are only composed of malachite. Heterogenite shows very bright white color under the reflected microscope, and belongs to 3R polytype, because it has d-spacings at $4.39{\AA}$ and $2.316{\AA}$. Since NiO and $Fe_20_3$ content of heterogenite are lower than those of 3R polytype from other localities, it cannot completely exclude the presence of 2H polytype in heterogenite from this study. Malachite is light grey color under the reflected microscope with approximate chemical formula of $Cu_{1.97}Co_{0.02}Fe^{2+}{_{0.01}}CO_3(OH)_2$. Heterogenite and malachite were probably formed at the supergene emichment stage, the last mineralization stage in the Central African Copperbelt. Cobalt seems to be much more emiched in the black supergene (oxy)hydroxide ore than those in the primary sulfide ore.

• Korean Journal of Materials Research
• /
• v.9 no.7
• /
• pp.707-714
• /
• 1999

To save electrical energy as much as 40 % for fluorescent lighting, the reflectors coated with silver reflective thin films recently became popular with higher reflectivities and long life. The thin films fabricated by using sputtering techniques are produced mainly in U.S.A. On the other hand, some silver films deposited by using evaporation methods show low adhesion in general, although the reflectivity is no problem. We have studied various PVD methods to obtain thin films with high reflectivity and adhesion on a substrate of polyester, for a couple of years. Silver films manufactured byusing evaporation showed the reflectivity of 96.4 % and the adhesion of $12 kg/\textrm{cm}^2$. while samples manufactured by using sputtering depicted the adhesion as much as $20 Kg/\textrm{cm}^2$ that is almost double, although their reflectivity was not much different. X-ray diffraction spectra for the sputtered films demonstrated a preferential growth on (111) plane and the cross-sections of the specimens revealed a dense columnar structure to result in the enhanced adhesion.

• Progress in Medical Physics
• /
• v.12 no.1
• /
• pp.51-58
• /
• 2001

Synchrotron radiation (SR) has several advantages over convetional x-rays, including its phase, collimation, and high flux. A synchrotron radiation beamline 5C1 at Pohang Light Source (PLS) was recently built for imaging applications. We have shown that a SR imaging system is useful in imaging microscopic structures. SR with broad-band energy spectrum were adjusted to an object by Si wafers and their energy were approximately ranging from 6 keV to 30 keV. SR were passed through an object and finally transformed into visible lights by CdWO$_4$ scintillator screen. The visible lights which were reflected at an angle of 90 degrees by gold plated mirror were detected by a CCD camera and the image data were acquired using image acquisition system. A high-resolution phantom, capacitor, adult tooth, child tooth, cancerous breast tissue, and mouse lumbar vertebra were imaged with SR imaging system. The Objects were rotated within the field of view of the CCD detector, and their projection image data were obtained at 250 steps over 180 degrees rotation. Image reconstructions were carried out in a PC by using IDLTM(Research systems, Inc., US) program. The spatial resolution of the images acquired by the SR imaging system was measured with a high-resolution chart manufactured for several micrometer resolution. The specimens were also imaged with conventional x-ray radiography system to compare the image quality of radiography obtained with the SR imaging system. The results showed more structural details and high contrast images with SR imaging system than conventional x-ray radiography system. The SR imaging system may have a potential for imaging in biological researches, material applications, and clinical radiography.

• Journal of the Korean Society for Railway
• /
• v.16 no.6
• /
• pp.454-459
• /
• 2013

Pressure waves are generated and propagate in a tunnel when train enters tunnel high speed. A compression wave due to the entry of train head propagates along the tunnel and is reflected at tunnel exit as an expansion wave. An expansion wave due to the entry of the train tail propagates along the tunnel and is reflected at tunnel exit as a compression wave. These pressure waves are repeatedly propagated and reflected at the tunnel entrance and exit. Severe pressure changes causes ear-discomfort for passengers in the cabin and micro pressure waves around the tunnel exit. It is necessary to analyze the transient pressure phenomena in tunnels qualitatively and quantitatively, because pressure change rate is considered as one of the major design parameters for optimal tunnel cross sectional area and repeated fatigue force on car body. In this study, we developed a characteristics method based on a fixed mesh system and boundary conditions for crossing trains and analyzed this system using an X-t diagram. The results of the simulation show that offsetting of pressure waves occurs for special entry conditions of a crossing train.

• Proceedings of the Korea Crystallographic Association Conference
• /
• 2002.11a
• /
• pp.35-35
• /
• 2002

나노미터 표준을 확립하기 위하여 일체식 엑스선 간섭계에 광간섭계를 결합시킨 복합간섭계를 구성하였다. 복합간섭계는 광간섭계의 Zero crossing 지점부터 표준시편이 올려진 미소이동대의 이동거리를 변화된 위상값으로 읽고 그 변화량을 고분해능 변위 측정기인 엑스선 간섭계로 읽어들이는 구조로 구성된다. 본 연구에서는 미소이동대의 위치 변화와 관련된 광간섭계의 위상 안정도, 엑스선 간섭계 및 미소이동대의 위치 안정도 등이 나노미터 영역의 길이 측정에 매우 중요한 요인이 되므로, 미소이동대의 위치 변화시 정지상태에서의 위상 잠김 (phase locking) 안정도를 측정하였다. 마이켈슨 레이저간섭계의 한쪽 팔을 고정시키고 다른 한 팔은 미소이동대 위에 반사거울을 설치하여 미소이동대의 움직임을 측정하였다. 보다 안정된 위상잠김 상태를 확보하기 위하여 PID feedback loop controller를 사용하였다. 측정 결과 위상 변동폭이 0.022 degree 이하의 높은 위상잠김 안정도를 확보하였으며, 이를 길이단위로 환산하면 정지상태에서 약 0.02 nm 이하의 위치 안정도를 나타낸다.