Tribological characteristics of sputtered MoS$_2$ films with Magnetron Sputtering Method in High Vacuum
(Magnetron Sputtering법에 의해 증착한 MoS$_2$ 박막의 고진공하에서의 트라이볼로지적 특성)
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- Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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- 2000.11a
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- pp.406-413
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- 2000