• Title/Summary/Keyword: water film thickness

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Role of HCl in Atomic Layer Deposition of TiO2 Thin Films from Titanium Tetrachloride and Water

  • Leem, Jina;Park, Inhye;Li, Yinshi;Zhou, Wenhao;Jin, Zhenyu;Shin, Seokhee;Min, Yo-Sep
    • Bulletin of the Korean Chemical Society
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    • v.35 no.4
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    • pp.1195-1201
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    • 2014
  • Atomic layer deposition (ALD) of $TiO_2$ thin film from $TiCl_4$ and $H_2O$ has been intensively studied since the invention of ALD method to grow thin films via chemical adsorptions of two precursors. However the role of HCl which is a gaseous byproduct in ALD chemistry for $TiO_2$ growth is still intriguing in terms of the growth mechanism. In order to investigate the role of HCl in $TiO_2$ ALD, HCl pulse and its purging steps are inserted in a typical sequence of $TiCl_4$ pulse-purge-$H_2O$ pulse-purge. When they are inserted after the first-half reaction (chemisorption of $TiCl_4$), the grown thickness of $TiO_2$ becomes thinner or thicker at lower or higher growth temperatures than $300^{\circ}C$, respectively. However the insertion after the second-half reaction (chemisorption of $H_2O$) results in severely reduced thicknesses in all growth temperatures. By using the result, we explain the growth mechanism and the role of HCl in $TiO_2$ ALD.

Electrochemical Properties of Activated Carbon Capacitor Adopting a Proton-conducting Hydrogel Polymer Electrolyte (수소이온전도성 고분자 겔전해질을 적용한 활성탄소계 전기이중층 캐패시터의 전기화학적 특성)

  • Latifatu, Mohammed;Kim, Kwang Man;Kim, Yong Joo;Ko, Jang Myoun
    • Elastomers and Composites
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    • v.47 no.4
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    • pp.292-296
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    • 2012
  • An electric double-layer capacitor (ELDC) of activated carbon electrode is prepared using a proton-conducting hydrogel polymer electrolyte, which is composed of poly(vinyl alcohol), silicotungstic acid, $H_3PO_4$, and deionized water. A solid film by evaporating the hydrogel polymer electrolyte is also prepared for comparison. The hydrogel polymer electrolyte also acts as a separator with the thickness of about $80{\mu}m$ and the room-temperature ionic conductivity of $10^{-2}S\;cm^{-1}$. The EDLC containing the symmetric electrodes of activated carbon shows the specific capacitance of $58F\;g^{-1}$ at $100mV\;s^{-1}$ with a good cycle life, implying that the hydrogel polymer electrolyte is very promising for use in EDLCs.

The study on corrosion of the inner area of closed box-girder for unpainted weathering steel bridges (무도장 내후성 강 교량의 밀폐형 박스거더 내부의 부식에 대한 고찰)

  • Ma, Seung-Hwan;Noh, Young-Tai;Jang, Gun-Ik
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.16 no.4
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    • pp.2391-2400
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    • 2015
  • Weather proof steels are used for steel bridges due to its high corrosion resistance under atmospheric conditions. However, instead of forming stabilized rust layers, general rust occurs on weather proof steels under high humidity condition close to seawater or shady places. In Japan, therefore, they perform rust stabilization treatment instead of unpainted treatment due to severe atmospheric conditions. However, most of domestic weather proof steels were constructed unpainted in the form of closed box-girder, which makes the periodical repetition of dry and wet hard to occur. For the steel bridges constructed on the Han river, the evaporation of water, dew condensation due to temperature change, and stagnant water due to rain affect harmfully on the formation of passive film on weather proof steels. Thus, in this research, in order to analyze corrosion properties inside the closed box-girder for the unpainted weather proof steel bridge in the waterworks safety zone, multiple ways of analysis such as observation with eyes, cellophane-tape test, steel thickness measurement, surface corrosion potential measurement, electron microscope analysis, and X-ray diffraction analysis of the rust were performed. As a result, unstable rust layer was observed inside the closed box-girder, and severe corrosion was observed on the top and bottom of the flanges due to the effects of stagnant water caused by rain, dew condensation, and de-icing materials.

Electrical Characteristic of IGZO Oxide TFTs with 3 Layer Gate Insulator

  • Lim, Sang Chul;Koo, Jae Bon;Park, Chan Woo;Jung, Soon-Won;Na, Bock Soon;Lee, Sang Seok;Cho, Kyoung Ik;Chu, Hye Yong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.344-344
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    • 2014
  • Transparent amorphous oxide semiconductors such as a In-Ga-Zn-O (a-IGZO) have advantages for large area electronic devices; e.g., uniform deposition at a large area, optical transparency, a smooth surface, and large electron mobility >10 cm2/Vs, which is more than an order of magnitude larger than that of hydrogen amorphous silicon (a-Si;H).1) Thin film transistors (TFTs) that employ amorphous oxide semiconductors such as ZnO, In-Ga-Zn-O, or Hf-In-Zn-O (HIZO) are currently subject of intensive study owing to their high potential for application in flat panel displays. The device fabrication process involves a series of thin film deposition and photolithographic patterning steps. In order to minimize contamination, the substrates usually undergo a cleaning procedure using deionized water, before and after the growth of thin films by sputtering methods. The devices structure were fabricated top-contact gate TFTs using the a-IGZO films on the plastic substrates. The channel width and length were 80 and 20 um, respectively. The source and drain electrode regions were defined by photolithography and wet etching process. The electrodes consisting of Ti(15 nm)/Al(120 nm)/Ti(15nm) trilayers were deposited by direct current sputtering. The 30 nm thickness active IGZO layer deposited by rf magnetron sputtering at room temperature. The deposition condition is as follows: a rf power 200 W, a pressure of 5 mtorr, 10% of oxygen [O2/(O2+Ar)=0.1], and room temperature. A 9-nm-thick Al2O3 layer was formed as a first, third gate insulator by ALD deposition. A 290-nm-thick SS6908 organic dielectrics formed as second gate insulator by spin-coating. The schematic structure of the IGZO TFT is top gate contact geometry device structure for typical TFTs fabricated in this study. Drain current (IDS) versus drain-source voltage (VDS) output characteristics curve of a IGZO TFTs fabricated using the 3-layer gate insulator on a plastic substrate and log(IDS)-gate voltage (VG) characteristics for typical IGZO TFTs. The TFTs device has a channel width (W) of $80{\mu}m$ and a channel length (L) of $20{\mu}m$. The IDS-VDS curves showed well-defined transistor characteristics with saturation effects at VG>-10 V and VDS>-20 V for the inkjet printing IGZO device. The carrier charge mobility was determined to be 15.18 cm^2 V-1s-1 with FET threshold voltage of -3 V and on/off current ratio 10^9.

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EFFECT OF CHEMICAL TREATMENT ON THE BIOACTIVITY OF TITANIUM (화학적 처리가 티타늄의 생체활성도에 미치는 영향)

  • Min Kwan-Sik;Lee Min-Ho;Ahn Seung-Geun;Park Charn-Woon
    • The Journal of Korean Academy of Prosthodontics
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    • v.43 no.4
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    • pp.562-572
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    • 2005
  • Statement of problem : Titanium is widely used as an implant material lot artificial teeth. Also, studies on surface treatment to form a fine passive film on the surface of commercial titanium or its alloys and improving bioactivity with bone have been carried out. However, there is insufficient data about the biocompatibility of the implant materials in the body. Purpose: The purpose of this study was to examine whether the precipitation of apatite on titanium metal is affected by surface modification. Materials and methods: Specimens chemically washed for 2 minute in a 1:1:1.5 (in vol%) mixture of 48% HF 60% $HNO_3$ and distilled water. Specimens were then chemically treated with a solution containing 97% $H_2SO_4$ and 30% $H_2O_2$ at $40^{\circ}C$S for 1 hour, and subsequently heat-treated at $400^{\circ}C$ for 1 hour. All specimens were immersed in the HBSS with pH 7.4 at $36.5^{\circ}C$ for 15 days, and the surface were examined with TF-XRD, SEM, EDX and XPS. Also, commercial purity Ti specimens with and without surface treatment were implanted in the abdominal connective tissue of mice for 4 weeks. Conventional aluminium and stainless steel 316L were also implanted for comparison. Results and conclusions : The results obtained were summarized as follows. 1. An amorphous titania gel layer was formed on the titanium surface after the titanium specimen was treated with a $H_2SO_4$ and $H_2O_2$ solution. The average roughness was $2.175{\mu}m$ after chemical surface treatment. 2. The amorphous titania was subsequently transformed into anatase by heat treatment at $400^{\circ}C$ for 1 hour. 3. The average thickness of the fibrous capsule surrounding the specimens implanted in the connective tissue was $46.98{\mu}m$ in chemically-treated Ti, and 52.20, 168.65 and $100.95{\mu}m$ respectively in commercial pure Ti, aluminum and stainless steel 316L without any treatment.

Finite element analysis for acoustic and temperature characteristics of a piezoelectric HIFU transducer at 10 MHz (10 MHz용 압전 HIFU 트랜스듀서의 음향 및 온도 특성에 대한 유한요소해석)

  • Jong-Ho Kim;Il-Gok Hong;Ho-Yong Shin;Hyo-Jun Ahn;Jong-In Im
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.33 no.3
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    • pp.116-123
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    • 2023
  • A high intensity focuses ultrasound (HIFU) is one of the emerging technologies in the biomedical field. The piezoelectric HIFU transducer is a device that utilizes the thermal energy generated by high ultrasound energy. Recently an operating frequency of the HIFU transducer is to expand above a 7 MHz. In this study, the acoustic pressures and temperature distributions in the tissue that generated by the HIFU transducer at 10 MHz were calculated with the finite element method. In addition, the pressure focusing characteristics of the device were analyzed. The geometrical variables are the piezomaterial thickness, lens shape, water height, and film thickness. The results shown that the acoustic pressure increased and saturated gradually when the height/radius (HL/RL) ratio of the lens increased. Moreover, the focal area was gradually decreases with HL/RL ratio of the lens. In case of the optimized HIFU transducer, the maximum pressure and temperature were analyzed about 19 MPa and 65℃ respectively. And the -3 dB focused distances in the axial and lateral direction are around 2.3 mm and 0.23 mm respectively.

Electrochemical treatment of wastewater using boron doped diamond electrode by metal inter layer

  • KIM, Seohan;YOU, Miyoung;SONG, Pungkeun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.251-251
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    • 2016
  • For several decades, industrial processes consume a huge amount of raw water for various objects that consequently results in the generation of large amounts of wastewater. Wastewaters are consisting of complex mixture of different inorganic and organic compounds and some of them can be toxic, hazardous and hard to degrade. These effluents are mainly treated by conventional technologies such are aerobic and anaerobic treatment and chemical coagulation. But, these processes are not suitable for eliminating all hazardous chemical compounds form wastewater and generate a large amount of toxic sludge. Therefore, other processes have been studied and applied together with these techniques to enhance purification results. These include photocatalysis, absorption, advanced oxidation processes, and ozonation, but also have their own drawbacks. In recent years, electrochemical techniques have received attention as wastewater treatment process that could be show higher purification results. Among them, boron doped diamond (BDD) attract attention as electrochemical electrode due to good chemical and electrochemical stability, long lifetime and wide potential window that necessary properties for anode electrode. So, there are many researches about high quality BDD on Nb, Ta, W and Si substrates, but, their application in effluents treatment is not suitable due to high cost of metal and low conductivity of Si. To solve these problems, Ti has been candidate as substrate in consideration of cost and property. But there are adhesion issues that must be overcome to apply Ti as BDD substrate. Al, Cu, Ti and Nb thin films were deposited on Ti substrate to improve adhesion between substrate and BDD thin film. In this paper, BDD films were deposited by hot filament chemical vapor deposition (HF-CVD) method. Prior to deposition, cleaning processes were conducted in acetone, ethanol, and isopropyl alcohol (IPA) using sonification machine for 7 min, respectively. And metal layer with the thickness of 200 nm were deposited by DC magnetron sputtering (DCMS). To analyze microstructure X-ray diffraction (XRD, Bruker gads) and field emission scanning electron microscopy (FE-SEM, Hitachi) were used. It is confirmed that metal layer was effective to adhesion property and improved electrode property. Electrochemical measurements were carried out in a three electrode electrochemical cell containing a 0.5 % H2SO4 in deionized water. As a result, it is confirmed that metal inter layer heavily effect on BDD property by improving adhesion property due to suppressing formation of titanium carbide.

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A Study of Photoelectrolysis of Water by Use of Titanium Oxide Films (산화티타늄 피막의 광 전기분해 특성에 관한 연구)

  • Park, Seong-Young;Cho, Byung-Won;Ju, Jeh-Beck;Yun, Kyung-Suk;Lee, Eung-Cho
    • Applied Chemistry for Engineering
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    • v.3 no.1
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    • pp.88-99
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    • 1992
  • For the development of semiconducting photoelectrode to be more stable and efficient in the process of photoelectrolysis of the water, pure titanium rods were oxidized by anodic oxidation, furance oxidation and flame oxidation and used as electrodes. The Indium islands were formed by electrodeposition of "In" thin film on $TiO_2$ and Ti by electrodeposition. Also $A1_2O_3$ and NiO islands were coated on Ti by the electron-beam evaporation technique. The maximum photoelectrochemical conversion efficiency(${\eta}$) was 0.98% for flame oxidized electrode($1200^{\circ}C$ for 2min in air). Anodically oxidized electrodes have photoelectrochemical conversion efficiency of 0.14%. Furnace oxidized electrode($800^{\circ}C$ for 10min in air) has 0.57% of photoelectrochemical efficiency and shows a band-gap energy of about 2.9eV. The $In_2O_3$ coated $TiO_2$ exhibits 0.8% of photoelectrochemical efficiency but much higher value of ${\eta}$ was obtained with the Increase of applied blas voltage. However, $Al_2O_3$ or NiO coated $TiO_2$ shows much low value of ${\eta}$. The efficiency was dependent on the presence of the metallic interstitial compound $TiO_{0+x}$(x<0.33) at the metal-semiconductor interface and the thickness of the suboxide layer and the external rutile scale.

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A STUDY ON FRACTURAL BEHAVIOR OF DENTIN-RESIN INTERFACE (상아질-복합레진 접착계면의 파괴거동에 대한 연구)

  • Ryu, Gil-Joo;Choi, Gi-Woon;Park, Sang-Jin;Choi, Kyung-Kyu
    • Restorative Dentistry and Endodontics
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    • v.32 no.3
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    • pp.208-221
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    • 2007
  • The fracture toughness test is believed as a clinically relevant method for assessing the fracture resistance of the dentinal restoratives. The objectives of this study were to measure the fracture toughness $(K_{1C})$ and microtensile bond strength of dentin-resin composite interface and compare their relationship for their use in evaluation of the integrity of the dentin-resin bond. A minimum of six short-rod specimens for fracture toughness test and fifteen specimens for microtensile bond strength test was fabricated for each group of materials used. After all specimens storing for 24 hours in distilled water at $37^{\circ}C$, they were tensile-loaded with an EZ tester universal testing machin. Statistical analysis was performed using ANOVA and Tukey's test at the 95% confidence level, Pearson's coefficient was used to verify the correlation between the mean of fracture toughness and microtensile bond strength. FE-SEM was employed on fractured surface to describe the crack propagation. Fracture toughness value of Clearfil SE Bond (SE) was the highest, followed by Adper Single Bond 2 (SB), OptiBond Solo (OB), ONE-STEP PLUS (0S), ScotchBond Multi-purpose (SM) and there was significant difference between SE and other 4 groups (p < 0.05). There were, however, no significant difference among SB, OB, OS, SM (p > 0.05). Microtensile bond strength of SE was the highest, followed by SB, OB, SM, OS and OS only showed significant lower value (p < 0.05). There was no correlation between fracture toughness and microtensile bond strength values. FE-SEM examination revealed that dentin bonding agent showed different film thickness and different failure pattern according to the film thickness. From the limited results of this study, it was noted that there was statistically no correlation between K1C and ${\mu}TBS$. We can conclude that for obtaining the reliability of bond strength test of dentin bonding agent, we must pay more attention to the test procedure and its profound scrutiny.

Edible Films from Protein Concentrates of Rice Wine Meal (주박 단백질 농축물로부터 가식성필름의 제조)

  • Cho, Seung-Yong;Park, Jang-Woo;Rhee, Chul
    • Korean Journal of Food Science and Technology
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    • v.30 no.5
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    • pp.1097-1106
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    • 1998
  • Biodegradable edible films were prepared from rice protein concentrates (RPC) made from rice wine meal by alkaline extraction and isoelectric precipitation. The effect of film forming solution pH and plasticizers were studied, and cross-linkers were added to improve mechanical properties and water vapor permeabilities (WVP) of films. Films could be formed within pH $8{\sim}11$ with tensile strength (TS) of 4.3{\sim}5.7\;MPa$. Films produced under pH 11 had the highest TS (5.7 MPa) and the lowest WVP $(0.44\;ng{\cdot}m/m^2{\cdot}s{\cdot}Pa)$. Added glycerol, polyethylene glycol 200 (PEG) and its mixture (GLY:PEG=50:50) as plasticizers also affected the mechanical properties and WVP of films. TS and elongation at break (E) of films at various plasticizer levels were $5.5{\sim}1.0\;MPa$ and $3.6{\sim}24.3%$, respectively. At the same plasticizer concentration, the highest TS was observed when glycerol was used whereas the highest E was measured when mixture was used as plasticizer. WVPs of films with thickness of $60\;{\mu}m$ were $0.39{\sim}0.54\;ng{\cdot}m/m^2{\cdot}s{\cdot}Pa$. WVP of films decreased as the ratio of glycerol/PEG 200 was decreased, and WVP increased as the total amount of plasticizer added to the films increased. Film strength was improved by the addition of small amount of sodium hydrogen sulfate, succinic anhydride, ascorbic acid and citric acid, whereas TS of films containing $0.5{\sim}2.0%$ of NaCl and $CaCl_2$ were lower than those without the salts. The highest TS (6.3 MPa) was achieved with films containing 0.1% of succinic anhydride.

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