• 제목/요약/키워드: wafering technique

검색결과 2건 처리시간 0.014초

응력 주입 층을 이용한 Kerf-less 웨이퍼링 기술 동향

  • 양현석;엄누시아;김지원;임재홍
    • 세라미스트
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    • 제21권2호
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    • pp.75-82
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    • 2018
  • In the photovoltaics (PV) industry, there were many efforts to reduce the cost of production with high efficiency. The single most important cost factor in silicon technology is the wafer, accounting presently for ~35% of the module cost. it was already shown that the solar cell efficiency can be maintained up to the thickness range of $40-60{\mu}m$. The direct production of ultra-thin silicon wafer is very attractive and numerous different techniques, such as electrochemical process, ion implantation, and epitaxial growth, have been proposed and developed in many academic and industrial laboratories.

The removal of saw marks on diamond wire-sawn single crystalline silicon wafers

  • Lee, Kyoung Hee
    • 한국결정성장학회지
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    • 제26권5호
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    • pp.171-174
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    • 2016
  • The diamond wire sawing method to produce silicon wafers for the photovoltaic application is still a new and highly investigated wafering technology. This technology, featured as the higher productivity, lower wear of the wire, and easier recycling of the coolant, is expected to become the mainstream technique for slicing the silicon crystals. However, the saw marks on the wafer surface have to be investigated and improved. This paper discusses the removal of saw marks on diamond wire-sawn single crystalline silicon wafer. With a pretreatment step using tetramethyl ammonium hydroxide ($(CH_3)_4NOH$, TMAH) and conventional texturing process with KOH solution (1 % KOH, 8 % IPA, and DI water), the saw marks on the surface of the diamond wire-sawn silicon wafers can be effectively removed and they are invisible to naked eyes completely.