• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.19 no.8
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• pp.838-842
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• 2009

Vibrational analysis is presented for a visual alignment system of nano-imprint process in this study. For a nano-imprinting equipment, the visual alignment system is one of the essential parts in order to align the mold into the target panel. For the precision alignment, the vibration from inside and outside of the vision system should be avoided, and the elimination of the vibration should be considered in the design process of the visual alignment design. In this work, vibrational characteristics for the vision system frame is analyzed and topology optimization of a frame section area is carried out. With the results of the analysis, a new frame design are suggested. Design consideration for constructing a visual alignment system in view of optimal design is also discussed.

• Journal of Institute of Control, Robotics and Systems
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• v.16 no.12
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• pp.1233-1240
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• 2010

In the flat panel display and semiconductor industries, the visual alignment system is considered as a core technology which determines the productivity of a manufacturing line. It consists of the vision system to extract the centroids of alignment marks and the stage control system to compensate the alignment error. In this paper, we develop a Kalman filter algorithm to estimate the alignment mark postures and propose a coarse-fine alignment control method which utilizes both original fine images and reduced coarse ones in the visual feedback. The error compensation trajectory for the distributed joint servos of the alignment stage is generated in terms of the inverse kinematic solution for the misalignment in task space. In constructing the estimation algorithm, the equation of motion for the alignment marks is given by using the forward kinematics of alignment stage. Secondly, the measurements for the alignment mark centroids are obtained from the reduced images by applying the geometric template matching. As a result, the proposed Kalman filter based coarse-fine alignment control method enables a considerable reduction of alignment time.

• Journal of the Semiconductor & Display Technology
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• v.10 no.4
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• pp.79-87
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• 2011

In this paper, suggested is a hybrid-type visual alignment system to align mask and panel in 3-D space, where mask and panel are to be controlled independently by two individual positioning mechanisms in order to compensate for spatial misalignments. In the hybrid visual alignment system, the below 4-PPR parallel mechanism provides in-plain motions to pattern mask like the other conventional alignment systems while the above 4-RPS parallel mechanism is to move glass panel to achieve a complete spatial alignment. For the control of the hybrid alignment system, first, inverse kinematic solutions for the parallel mechanisms are given to determine the driving distance of each active joint, and also an efficient way to determine the spatial alignment error is developed by exploiting three in-plane cameras.

• Journal of Institute of Control, Robotics and Systems
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• v.14 no.4
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• pp.369-375
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• 2008

The kinematics and control problem of a visual alignment system is investigated, which plays a crucial role in the fabrication process of flat panel displays. The first solution is the inverse kinematics of a 4PPR parallel alignment mechanism. It determines the driving distance of each joint to compensate the misalignment between mask and panel. Second, an efficient vision algorithm for fast alignment mark recognition is suggested, where by extracting essential feature points to represent the geometry of a mark, the geometric template matching enables much faster object recognition comparing with the general template matching. Finally, the overall visual alignment process including the kinematic solution, vision algorithm, and joint control is implemented and experimental results are given.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.273-277
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• 2003

A general process of electronic assembly is composed of a series of geometric alignments and bonding/screwing processes. After assembly, the function is tested in a following process of inspection. However, assembly of micro-optic devices requires both processes to be performed in equipment. Coarse geometric alignment is made by using vision and optical function is improved by the following fine motion based on feedback of tunable laser interferometer. The general system is composed of a precision robot system for 3D assembly, a 3D vision guided system for geometric alignment and an optical feedback system with a tunable laser. In this study, we propose a new fast alignment algorithm of micro-optic devices for both of visual and optical alignments. The main goal is to find a fastest alignment process and algorithms with state-of-the-art technology. We propose a new approach with an optimal sequence of processes, a visual alignment algorithm and a search algorithm for an optimal optical alignment. A system is designed to show the effectiveness and efficiency of the proposed method.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2009.04a
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• pp.428-429
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• 2009

• Journal of the Korean Society of Physical Medicine
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• v.16 no.4
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• pp.55-65
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• 2021

PURPOSE: This study compared the effects of sit-to-stand training with various foot positions combined with visual feedback on the postural alignment and balance. METHODS: Thirty stroke patients were assigned randomly into three groups of standing with a symmetrical foot position (SSF) (n = 10), asymmetrical foot position with the affected foot at the rear (SAF) (n = 10), and visual feedback and asymmetrical foot position (SVAF) (n = 10). Sit-to-stand training with different foot positions was performed for 30 minutes a day, five times a week, for a total of four weeks, and the effects on postural alignment and balance were assessed. RESULTS: The angle between the midline and scapula peak of the affected side was decreased significantly at sitting and thigh-off in the SAF group and at sitting, thigh-off, and standing in the SVAF group (p < .05). The angle between the midline and scapula peak of the non-affected side was increased significantly at sitting and thigh-off in the SAF group and at sitting, thigh-off, and standing in the SVAF group, the difference in the angle between the scapular peaks of the left and right sides was decreased significantly at sitting and thigh-off in SSF group, and at sitting in SAF group (p < .05). In the SVAF group, the angle at sitting, thigh-off, and standing was decreased significantly (p < .05). A comparison of the balance ability showed that BSS in the SVAF group was improved significantly (p < .05). CONCLUSION: Based on these results, the postural alignment and balance ability were improved in stroke patients who participated in sit-to-stand with visual feedback and asymmetrical foot position training.

• Journal of The Korean Society of Integrative Medicine
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• v.8 no.1
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• pp.113-124
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• 2020

Purpose : The purpose of this study was to investigate the effects of exercise intervention combined with 3D visual feedback and motion observation on postural alignment and cerebral cortical activity in subjects with forward head posture (FHP). Methods : The study included 28 participants with FHP, randomly divided into a 3D visual feedback plus motion observation group (n=14) or control group (n=14). The experimental group received corrective exercise combined with 3D visual feedback and motion observation for FHP, three times a week for four weeks. We examined cervical spine radiographs in the lateral standing position with both arms crossed to measure the craniovertebral angle (CVA) and cervical lordosis (CL). Relative alpha (RA) and beta waves (RB) were measured by wireless dry EEG. Results : The CVA value was significantly different between the groups, and the CL value was significantly different only in the experimental group. RA and RB values were not significantly different before and after intervention in the control group. RB values were significantly decreased before and after intervention in the experimental group. Conclusion : Based on the results of this study, we suggest that interventions combined with motion observation and 3D visual feedback may be effective as exercise methods to improve postural alignment and cerebral activity in subjects with FHP. Further research is required to generalize our results on technical supplementation complemented with 3D visual feedback devices.

• Journal of the Semiconductor & Display Technology
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• v.6 no.1 s.18
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• pp.43-48
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• 2007

For exposure systems, very accurate alignment between the mask and the substrate is indispensable. In this paper, an automatic alignment system using machine vision for exposure systems is described. Machine vision algorithms are described in detail including extraction of an alignment mark's center position and camera calibration. Methods for extracting parameters for alignment are also presented with some compensation techniques to reduce alignment time. Our alignment system was implemented with a vision system and motion control stages. The performance of the alignment system has been extensively tested with satisfactory results. The performance evaluation shows alignment accuracy of lum within total alignment time of about $2{\sim}3$ seconds including stage moving time.

• Journal of The Korean Society of Integrative Medicine
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• v.11 no.4
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• pp.269-279
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• 2023

Purpose : The most effective intervention for flat foot is strengthening exercises for the intrinsic and extrinsic of the foot. Additionally, visual feedback is necessary for movement accuracy. However, the effectiveness of the intervention when combined with visual feedback was not revealed. To confirm this, the research was to investigate the effect of visual feedback and a complex exercise program on navicular bone height, plantar pressure, and lower extremity alignment. Methods : The twenty eight adult men and women with flat foot were randomly assigned to group 1 (n=14) and group2 (n=14), group1 performed complex exercises with visual feedback, and group 2 performed only complex exercises. Both groups performed a 40 minute compound exercise program three times a week. Navicular drop test, plantar pressure test, and lower extremity alignment test were performed equally in both group. Results : As a result of comparing the change in navicular height within the group according to the intervention, both groups showed a significant difference before and after the exercise (p>.05). There was not significant difference comparing the difference between the groups in the navicular height (p>.05). Comparing the change in plantar pressure within groups, there was not significant difference in the change in plantar pressure in both groups (p>.05). Coparing the difference before and after exercise between groups, there was not significant plantar pressure (p>.05). Comparing the change in leg alignment within the group, there was a significant difference in the change in ankle before and after exercise in group 1 (p<.05), but there was not significant difference in group 2. There was not significant difference in pelvic tilt and knee tilt before and after exercise in both groups (p>.05). Comparing the before and after exercise difference between groups, there were not significant in all variables of leg alignment (p>.05). Conclusion : The results of this study showed that complex exercise applied to patients with flat foot were effective in increasing the height of the navicular bone and ankle angle, but there was no effect due to visual feedback.