• Title/Summary/Keyword: various substrate

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Phase Formation of $BaTiO_3$ Thin Films by Sputtering (Sputtering법에 의한 $BaTiO_3$ 박막의 상형성에 관한 연구)

  • 안재민;최덕균;김영호
    • Journal of the Korean Ceramic Society
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    • v.30 no.8
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    • pp.657-663
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    • 1993
  • BaTiO3 sputtering targets of 3 inch diameter were prepared by sintering the CIP (Cold Isotatic Pressing) compacts at 136$0^{\circ}C$ for 3hrs. The apparent density and grain size were 97% and 30${\mu}{\textrm}{m}$, respectively. After BaTiO3 films were deposited on Si and Pt/Ti/SiO2/Si substrates using these targets, films were annealed at various conditions and the crystallization behavior, reaction with the substrate and the electrical properties were investigated. The films on both substrates required 5~20hrs furnace annealing for crystallization at the temperatures from $600^{\circ}C$ to 80$0^{\circ}C$. For the films on Si substrate, interaction between the film and the substrate was suppressed upt o $700^{\circ}C$ for 10 hrs and the relative dielectric constant was 30. As the annelaing temperature and time were increased, the relative dielectric constants of the films decreased due to the formation of silicate phases through the reaction with the substrate. For the BaTiO3 films on Pt/Ti/SiO2/Si substrate, the reaction with the substrate was further reduced when the annealing condition was identical to that for Si substrate, but the reaction between the layers in Pt electrode took place above $700^{\circ}C$. When the films were annealed at $600^{\circ}C$ where the stability of Pt electrode was sustained, relative dielectric constant was increased to 110 since the reaction with substrate was effectively reduced even for a longer annealing time and the crystallization was enhanced.

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Evaluation of Brinell Hardness of Coated Surface by Finite Element Analysis: Part 2 - Influence of Substrate and Coating Thickness (유한요소해석에 의한 코팅면의 브리넬 경도 평가: 제2보 - 모재와 코팅두께의 영향)

  • Park, TaeJo;Kang, JeongGuk
    • Tribology and Lubricants
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    • v.37 no.4
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    • pp.144-150
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    • 2021
  • The most cost-effective method of reducing abrasive wear in mechanical parts is increasing their hardness with thin hard coatings. In practice, the composite hardness of the coated substrate is more important than that of the substrate or coating. After full unloading of the load applied to an indenter, its indentation hardness evaluated based on the dent created on the test piece was almost dependent on plastic deformation of the substrate. Following the first part of this study, which proposes a new Brinell hardness test method for a coated surface, the remainder of the study is focused on practical application of the method. Indentation analyses of a rigid sphere and elastic-perfect plastic materials were performed using finite element analysis software. The maximum principal stress and plastic strain distributions as well as the dent shapes according to the substrate yield stress and coating thickness were compared. The substrate yield stress had a significant effect on the dent size, which in turn determines the Brinell hardness. In particular, plastic deformation of the substrate produced dents regardless of the state of the coating layer. The hardness increase by coating behaved differently depending on the substrate yield stress, coating thickness, and indentation load. These results are expected to be useful when evaluating the composite hardness values of various coated friction surfaces.

Molecular Beam Epitaxial Growth of GaAs on Silicon Substrate (실리콘 기판위에 분자선속법으로 생장한 GaAs 에피층)

  • 이동선;우덕하;김대욱;우종천
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.1 no.1
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    • pp.82-91
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    • 1991
  • Molecular beam epitaxial growth of GaAs on Si substrate and the results on its analysis are reported. Epitaxy was performed on two different types of the substrate under various grwth conditions, and was analyzed by scanning and transmission electron microscopes, X-ray diffractometer, photoluminescence and Hall measurements. GaAs epitaxial layer has better crystalline quality when it was grown on a tilt-cut substrate. The stress seems to be releaxed more easily when multi-quantum well was introduced in the buffer layer. The epilayer was doped unintentionally with Si during growth due to the diffusion of the substrate. Also observed is that the quantum efficiency of excitonic radiative recombination of the heteroepitaxy is not as good as that of the homoepitaxy in the same doping level.

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Highly conductive and transparent ITO:Zr films for amorphous/crystalline silicon heterojnction solar cell

  • Kim, Yongjun;Hussain, Shahzada Quamar;Kim, Sunbo;Yi, Junsin
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.296-296
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    • 2016
  • ITO films doped with a small amount of high-permittivity materials not only retain the basic properties of ITO films but also improve some of their properties. We report the highly conductive and transparent (ITO:Zr) films with various substrate (RT to 300oC) temperatures on glass substrate for the HIT solar cell applications. We observed a decrease in sheet resistance from 36 to $11.8{\Omega}/{\Box}$ with the increasing substrate temperature from RT to 300oC, respectively. The ITO:Zr films showed also lowest resistivity of $1.38{\times}10-4{\Omega}.cm$ and high mobility of 42.37cm-3, respectively. The surface and grain boundaries are improved with the increase of substrate temperature as shown by SEM and AFM surface morphologies. The highly conductive and transparent ITO:Zr films were employed as front electrode in HIT solar cell and the best performance of device was found to be Voc = 710 mV, Jsc = 33.70 mA/cm2, FF = 0.742, ${\eta}=17.76%$ at the substrate temperature of $200^{\circ}C$.

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The Effect of the substrate temperature on the properties of GZOB films by DC magnetron sputtering (DC 마그네트론 스퍼터링법으로 증착한 GZOB 박막의 기판온도에 따른 특성)

  • Lee, Jong-Hwan;Yu, Hyun-Kyu;Lee, Kyung-Chun;Hur, Won-Young;Lee, Tae-Yong;Song, Joon-Tae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.106-107
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    • 2009
  • In this study, We investigated the effects of substrate temperature on the electrical and optical properties of Ga-, B-codoped ZnO(GZOB) thin films. GZOB thin films were deposited on glass substrate with various substrate temperature in the range from R.T. to $500\;^{\circ}C$ by DC magnetron sputtering. In the reslt, GZOB films at $400\;^{\circ}C$ exhibited a low resistivity value of $8.67\;{\times}\;10^{-4}\;{\Omega}-cm$, and a visible transmission of 80% with a thickness of 300 nm. This result indicated that the addition of Ga and B in ZnO films leads to the improvement of conductivity and transparent. From the result, we can confirm the possibility of the application as transparent conductive electrodes.

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Uniqueness of Microbial Cutinases in Hydrolysis of p-Nitrophenyl Esters

  • KIM, YANG-HOON;JEEWON LEE;SEUNG-HYEON MOON
    • Journal of Microbiology and Biotechnology
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    • v.13 no.1
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    • pp.57-63
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    • 2003
  • Using fungal (Fusarium solani f. pisi) and bacterial (Pseudomonas mendocina) cutinases, the initial hydrolysis rate of p-nitrophenyl esters was systematically estimated for a wide range of enzyme and substrate concentrations using a 96-well microplate reader. Both cutinases exhibited a high substrate specificity; i.e. a high hydrolytic activity on p-nitrophenyl butyrate (PNB), yet extremely low activity on p-nitrophenyl palmitate (PNP). When compared to the hydrolysis of PNB and PNP by other hydrolases [lipases and esterases derived from different microbial sources, such as bacteria (Pseudomonas cepacia, Psedomonas furescens, Baciilus stearothermophilus), molds (Aspeillus niger, mucor miehei), and yeasts (Candida rugosa, Candida cylindracea)], the above substrate specificity would seem to be a unique characteristic of cutinases. Secondly, the hydrolytic activity of the cutinases on PNB appeared much faster than that of the other hydrolytic enzymes mentioned above. Furthermore, the current study proved that even when the cutinases were mixed with large amounts of other hydrolases (lipases or esterases), the Initial hydrolysis rate of PNB was determined only by the cutinase concentration for each PNB concentration. This property of cutinase activity would seem to result from a higher accessibility to the substrate PNB, compared with the other hydrolytic enzymes. Accordingly, these distinct properties of cutinases may be very useful in the rapid and easy isolation of various natural cutinases with different microbial sources, each of which may provide a novel industrial application with a specific enzymatic function.

Fabrication and Characterizations of ITO Film as a Transparent Conducting Electrode for PDP Application (PDP 투명전극의 응용을 위한 ITO 박막의 제작평가)

  • Park, Kang-Il;Lim, Dong-Gun;Kwak, Dong-Joo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07b
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    • pp.788-791
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    • 2002
  • Tin doped indium oxide(ITO) films are highly conductive and transparent in the visible region whose property leads to the applications in solar cell, liquid crystal display, thermal heater, and other sensors. This paper investigated ITO films as a transparent conducting films for application of PDP. ITO films were grown on glass substrate by RF magnetron sputtering method. To achieve high transmittance and low resistivity, we examined the various film deposition such as substrate temperature, gas pressure, annealing temperature, and deposition time. We recommend the substrate temperature of $500^{\circ}C$ and post annealing of $200^{\circ}C$ in $O_2$ atmosphere for good conductivity and transmittance. From XRD examination, ITO films showed a preferred(222) orientation. As substrate temperature increased from RT to $500^{\circ}C$, the intensity of the (222) peak increased. The highest peak intensity was observed at a substrate temperature of $500^{\circ}C$. with the optimum growth conditions, ITO films showed resistivity of $1.04{\times}10^{-4}{\Omega}-cm$ and transmittance of 81.2% for a film 300nm thick in the wavelength range of the visible spectrum.

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Evaluating Interfacial Force between Viscoelastic Ink and Substrate in Gravure Printing Process (그라비아 프린팅 공정에서 점탄성 잉크와 기판의 계면접착력 평가)

  • Yu, Milim;Ahn, Kyung Hyun;Lee, Seung Jong
    • Korean Chemical Engineering Research
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    • v.53 no.1
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    • pp.111-115
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    • 2015
  • To produce patterns with high resolution in gravure printing, it is important to increase ink transfer ratio. The ink which has higher affinity with substrate can be transferred more from the roll to the substrate due to the good wettability between ink and substrate. However, it is difficult to evaluate the affinity between the substrate and the ink which is viscoelastic in nature. In this study, we suggest a practical method to evaluate the interfacial interaction between the ink and various substrates.

Development of Measurement System for Contact Angle and Evaporation Characteristics of a Micro-droplet on a Substrate (미소 액적의 접촉각 및 건조 특성 측정 시스템 개발)

  • Kwon, Kye-Si;An, Seung-Hyun;Jang, Min Hyuck
    • Journal of the Korean Society for Precision Engineering
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    • v.30 no.4
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    • pp.414-420
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    • 2013
  • We developed inkjet based measurement system for micro-droplet behavior on a substrate. By using the inkjet dispenser, a droplet, which is as small as few pico-liter in volume, can be jetted and the amount can be controlled. After jetting, the droplet image on the substrate is acquired from side view camera. Then, droplet profile is extracted to measure droplet volume, contact angle and evaporation characteristics. Also top view image of the droplet is acquired for better understanding of droplet shape. The previous contact angle measurement method has limitations since it mainly measures the ratio of height and contact diameter of droplet on a substrate. Unlike previous measurement system, our proposed method has advantages because various behavior of droplet on substrate can be effectively analyzed by extracting the droplet profile.

Effect of Substrate Temperature on Multi-component Particle Deposition and Consolidation in Flame Hydrolysis Deposition (화염가수분해 증착 공정에서 기판온도의 변화에 따른 다성분 입자의 부착 및 소결특성에 관한 연구)

  • Shin, Hyung-Soo;Baek, Jong-Gab;Choi, Man-Soo
    • Proceedings of the KSME Conference
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    • 2000.04b
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    • pp.428-433
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    • 2000
  • The consolidation behavior of multicomponent particles prepared by the flame hydrolysis deposition process is examined to identify the effects of Si substrate temperature. To fabricate multi-component particles, a vapor-phase ternary mixture of $SiCl_4(100 cc/min),\;BCl_3(30cc/min)\;and\;POCl_3,(5cc/min)$ was fed into a coflow diffusion oxy-hydrogen flame burner. The doped silica soot bodies were deposited on silicon substrates under various deposition conditions. The surface temperature of the substrate was measured by an infrared thermometer. Changes in the chemical states of the doped silica soot bodies were examined by FT-IR(Fourier-transformed infrared spectroscopy). The deposited particles on the substrate were heated at $1300^{\circ}C$ for 3h in a furnace at a heating rate of 10K/min. Si-O-B bending peak has been found when surface temperature exceeds $720^{\circ}C$. Correspondingly, the case with substrate temperatures above loot produced good consolidation result.

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