• Journal of the Semiconductor & Display Technology
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• v.17 no.2
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• pp.16-19
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• 2018

The development speed of semiconductor and display device manufacturing technology is growing faster than the development speed of process equipment. So, there is a growing need for process diagnostic technology that can measure process conditions in real time and directly. In this study, a plasma diagnosis was carried out using impedance variation due to the plasma discharge. Variation of the measurement impedance appears as a voltage change at the reference impedance, and the plasma density is calculated using this. The above experiment was conducted by integrating the plasma diagnosis system and the linear atmospheric pressure DBD plasma source. It was confirmed that plasma density varies depending on various parameters (gas flow rate, $Ar/O_2$ mixture ratio, Input power).

• The Transactions of the Korean Institute of Power Electronics
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• v.12 no.5
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• pp.372-377
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• 2007

This paper proposes a novel fault diagnosis method of a electrolytic capacitor used for DC-link voltage smoothing in adjustable speed drives. The equivalent series resistance (ESR) of the electrolytic capacitor is directly estimated from DC-link voltage and load currents and the status of the electrolytic capacitor is determined from the estimated ESR. To compensate the variation of the ESR owing to temperature variation, diodes are located on the same PCB near the capacitor and the temperature of the capacitor is sensed indirectly from the voltage drop of diodes. Simulation and experimental studies show the effectiveness of the proposed method.

• Journal of Power Electronics
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• v.13 no.6
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• pp.985-990
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• 2013

This paper proposes a novel fault diagnosis scheme using parameter estimation of the stator resistance, especially in the case of the open-phase faults of PMSM drives. The stator resistance of PMSMs can be estimated by the recursive least square (RLS) algorithm in real time. Fault diagnosis is achieved by analyzing the estimated stator resistance of each phase according to the fault condition. The proposed fault diagnosis scheme is implemented without any extra devices. Moreover, the estimated parameter information can be used to improve the control performance. The feasibility of the proposed fault diagnosis scheme is verified by simulation and experimental results.

• Korean Journal of Health Education and Promotion
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• v.32 no.3
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• pp.23-31
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• 2015

Objectives: The contribution of health behavior is high in the mortality variation. Mortality variation can be decreased through the policies and programs for improving health behavior. We investigated that health behaviors effected with standardized mortality in community. Methods: We examined the distribution of health determinant factors and correlation analyzed between factors and performed multiple linear regression. Data were collected from 2012 Community Health Survey in 253 communities, annual regional statistics, and statistics from Statistics Korea. Results: This study defined that the variation of standardized mortality and there are exist inequality level of health determinant factors in 253 communities. This study showed that the higher standardized mortality explained through health behavior factors of the current smoking rate, walking exercise rate and diagnosis of hypertension or diabetes rate after adjusted other factors(adjusted $R^2=0.709$, p<0.001). Conclusions: Smoking, walking exercise and diagnosis chronic disease affecting on the regional variation of standardized mortality. These factors can be improved by the local residents themselves.

• The Journal of the Korea institute of electronic communication sciences
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• v.8 no.1
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• pp.113-119
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• 2013

In this paper, n order to degrade of diagnosis of power supply by using Poincare map and fractal dimension with temperature measured by infrared camera. we review the characteristic of temperature variation according to pattern variation of power supply in chemical industry complex. As a simulation results we can be realized the characteristic behaviors of nonlinear dynamics in the poincare mal and fractal dimension. In the future verification method requires through additional research.

• The Journal of the Korea institute of electronic communication sciences
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• v.7 no.6
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• pp.1443-1447
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• 2012

In this paper, the characteristic of temperature variation was reviewed according to pattern variation. In order to degrade of diagnosis of power supply by using time series data for temperature measured by infrared camera it was transformed into 2 dimension phase plane using Takens embedding method. As a simulation results we cannot completely confirm the characteristic behaviors of nonlinear dynamics in phase plane. However these results has a certain patterns, it requires verification method through additional research in the future.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.3
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• pp.75-81
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• 1997

Automatic monitoring the cutting state is one of the important problems to increase the reliability of modern machining processes. In this study, cutting force signals were used in order to monitor the tool wear and fracture in the turning process. Turning experiments were performed using cemented carbide insert tools(K20) and STS304 steel as a workpiece. Cutting force signal characteristics and histogram analysis method were used to recognize the cutting states. It was found that tool wear and fracture can be diagnosed from the cutting force signal coefficient of variation(C.V.) and histogram analysis.

• Proceedings of the KIEE Conference
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• 2006.04a
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• pp.132-134
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• 2006

To improve equipment throughput and device yield, a malfunction in plasma equipment should be accurately diagnosed. A recognition model for plasma diagnosis was constructed by applying neural network to scanning electron microscope (SEM) image of plasma-etched patterns. The experimental data were collected from a plasma etching of tungsten thin films. Faults in plasma were generated by simulating a variation in process parameters. Feature vectors were obtained by applying direct and wavelet techniques to SEM Images. The wavelet techniques generated three feature vectors composed of detailed components. The diagnosis models constructed were evaluated in terms of the recognition accuracy. The direct technique yielded much smaller recognition accuracy with respect to the wavelet technique. The improvement was about 82%. This demonstrates that the direct method is more effective in constructing a neural network model of SEM profile information.

• Proceedings of the KIPE Conference
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• 2014.11a
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• pp.68-69
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• 2014

In the battery based applications such as electric vehicle and energy storage system, the performance of the system highly depends on the reliability of the battery. However, it is difficult to obtain the accurate information about the state-of-health (SOH) of battery during its operation. In this paper a 3kw battery charger with battery diagnosis function which can estimate the SOH of the battery by using online impedance spectroscopy technique is introduced. For the charger phase shift full bridge converter with synchronous rectification has been adopted to implement the charge and diagnosis functions. The impedance spectroscopy is performed after the charge to obtain the information about the internal impedance of the battery module, hence the SOH can be estimated online by observing the impedance variation of the battery over time. All the design procedure of the proposed charger is detailed and the feasibility of the system is verified by the experimental results.

• Proceedings of the KIEE Conference
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• summer
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• pp.1275-1277
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• 2004

In this paper, we propose a new diagnosis method of DC/DC converter aging. The method is based on the variations of parasitic resistor for the aging process. We apply an on-line diagnosis of DC/DC converter because the observation is not a device, but a system. This study proposes a method of DC/DC converter diagnosis by analyzing the variations of model on the variations of parasitic resistor.