• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.215-216
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• 2008

Using the extensional vibration mode of PZT ring, a piezopump is successfully made. The PZT ring is polarized with thickness direction. The traveling extensional wave along the circumference of the ring is obtained by dividing two standing waves which are temporally and spatially phase shifted by 90 degrees from each other. The proposed piezopump is consisted of coaxial cylindrical shells that are bonded piezoelectric ceramic ring.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.36 no.1
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• pp.7-13
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• 2008

In this paper, the pumping performance of a piezoelectric valveless micropump is simulated with a commercial finite element analysis software, COMSOL Multiphysics. The micropump developed in the previous work is composed of a 4-layer lightweight piezo-composite actuator (LIPCA), a polydimethylsiloxane (PDMS) pump chamber, and two diffusers. The piezoelectric domain, structural domain and fluid domain are coupled in the simulation. Water flow rates are numerically predicted for geometric parameters of the micropump. Based on this study, the micropump is optimally designed to obtain its highest pumping performance.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1186-1190
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• 2003

In this paper, a valveless bubble-actuated fluid micropump was has been developed and its performance was tested. The valveless micropump consists of the lower plate, the middle plate, the upper plate and a resistive heater. The lower plate includes the nozzle-diffuser elements and the double-chamber. Nozzle-diffuser elements and a double-chamber are fabricated on the silicon wafer by the DRIE(Deep Reactive Ion Etching) process. The lower plate also has inlet/outlet channels for fluid flow. The middle plate is made of glass and plays the role of the diaphragm. The chamber in the upper plate is filled with deionized water, and which contacts with the resistive heater. The resistive heater is patterned on a silicon substrate by Ti/Pt sputtering. Three plates and the resister heater are laminated by the aligner and bonded in the anodic bonder. Since the bubble is evaporated and condensed periodically in the chamber, the fluid flows from inlet to outlet with respect to the diffusion effect. In order to avoid backflow, the double chamber system is introduced. Analytical and experimental results show the validity of the developed double-chamber micropump.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.17 no.6
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• pp.544-551
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• 2005

The flow characteristics have been numerically investigated for various shapes of the diffuser/nozzles which are used for a valveless micro-pump. The important parameters considered in this study are the throat width ($15\~120\mu$m), the taper angle ($3.15\~25.2^{\circ}$), and the diffuser length ( $600\~4,800\mu$m), and the size of the middle chamber ($1\~16mm^2$). To find the optimal values for these parameters, steady state calculations have been performed assuming the constant pressure difference between the inlet and exit of the flow For the taper angle and the throat width, it is found that there exists an optimum at which the net flow rate is the greatest. The optimal taper angle is in the range of $10\~20^{\circ}$ for all the pressure differences; and the throat width indicates an optimal value near $75\mu$m for the case of 35 kPa pressure difference. The net flow rate is also influenced by the size of the middle chamber. With decreasing chamber size, the net flow rate is reduced because of the interference between two streams flowing into the middle chamber. The unsteady pulsating flow characteristics for a micro-pump with a given diffuser/nozzle shape have been also investigated to show the validity of the steady state parametric study.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.37 no.8
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• pp.744-750
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• 2009

In this study, the pumping performance of a piezoelectric valveless micropump is simulated. The micropump, which was developed in the previous work, is composed of a four-layer lightweight piezocomposite actuator, a polydimethylsiloxane (PDMS) pump chamber, and two diffusers. The piezoelectric domain, the fluid domain and the structural domain are coupled in the three-dimensional simulation. We used ANSYS for the piezoelectric and structural domains and ANSYS CFX for the fluid domain. The effects of driven frequency on the flow rate have been investigated by simulating the flow characteristics for 10 Hz and 40 Hz driven frequencies. The flow rates with respect to driven frequencies up to 300 Hz have been calculated.