• 한국초전도ㆍ저온공학회논문지
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• 제13권4호
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• pp.30-35
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• 2011

This paper describes experimental study and performance improvement of 2 stage Gifford-McMahon (G-M) type pulse tube cryocooler for cryopump. The objective of this study is to improve the efficiency of 2 stage pulse tube cryocooler for substituting 2 stage G-M cryocooler used in cryopump. The target cooling capacities are 5 W at 20 K and 35 W at 80 K for the $1^{st}$ and the $2^{nd}$ stage, respectively. These values are good cooling capacities for vacuum level in medium size ICP 200 cryopump. Design of the 2 stage pulse tube cryocooler is conducted by FZKPTR(Forschungs Zentrum Karlsruhe Pulse Tube Refrigerator) program. In order to improve the performance of 2 stage pulse tube cryocooler, U-type pulse tube cryocooler is fabricated and connecting tubes are minimized for reducing dead volumes and pressure losses. Also, to get larger capacities, orifice valves and double inlet valves are optimized and the compressor of 6 kW is used. On the latest unit, the lowest temperatures of 2 stage pulse tube cryocooler are 42 K ($1^{st}$ stage) and 8.3 K ($2^{nd}$ stage) and the cooling capacities are 40 W at 82.9 K ($1^{st}$ stage) and 10 W at 20.5 K ($2^{nd}$ stage) with 6.0 kW of compressor input power. This pulse tube cryocooler is suited for commercial medium size cryopump. In performance test of cryopump with 2 stage pulse tube cryocooler, pumping speed for gaseous nitrogen is 4,300 L/s and the ultimate vacuum pressure is $7.5{\times}10^{-10}$ mbar.

• Korean Chemical Engineering Research
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• 제51권3호
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• pp.358-363
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• 2013

순수한 리튬-암모니아(Li-$NH_3$) 솔루션의 생성은 진공 상태에서 가능하지만, 고효율 열전전력을 얻기 위한 안정적이고 신뢰성 있는 분해에 대한 문제가 아직 남아있다. 본 논문은 Li-$NH_3$ 솔루션의 열전변환 효율을 향상시키기 위한 새로운 방법을 다루었다. 제안된 방법은 Li-$NH_3$ 솔루션의 합성과 분해를 위해 'U' 형태의 파이렉스 진공 튜브를 사용하였다. 튜브 상부에는 기존 'U' 형태의 파이렉스 진공 튜브의 두 다리를 연결하는 기체의 이동통로가 있는데, 이는 고온부(Hot side)에서 분해가 진행될 때 $NH_3$ 기화에 따른 양단의 내부압력 불균형을 방지하는 역할을 한다. 열전 실험결과, 'U' 형태 튜브 속에서 솔루션 반응은 기존 'U' 형태에 비해 매우 안정적이고 효율적으로 이루어졌으며, 결과적으로 열전변환 효율이 향상됨을 보였다. 또한, 제안 방식은 장시간에 걸친 고효율 열전 발전을 위해 튜브 속에서 합성과 분해가 순환되는 가역반응을 제공함이 입증되었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.135-135
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• 2015

Tubes are of extreme importance in industries as for fluid channels or wave guides. Furthermore, some weapon systems such as cannons use the tubes as gun barrels. To increase the service life of such tubes, a protective coating must be applied to the tubes' inner surface. However, the coating methods applicable to the inner surface of the tubes are very limited due to the geometrical restriction. A small-diameter cylindrical magnetron sputtering gun can be used to deposit coating layers on the inner surface of the large-bore tubes. However, for small-bore tubes with the inner diameter of one inch (~25 mm), the magnetron sputtering method can hardly be accommodated due to the space limitation for permanent magnet assembly. In this study, a new approach to coat the inner surface of small-bore tubes with the inside diameter of one inch was developed. Instead of using permanent magnets for magnetron operation, an external electro-magnet assembly was adopted around the tube to confine the plasma and to sustain the discharge. The electro-magnet was operated in pulse mode to provide the strong axial magnetic field for the magnetron operation, which was synchronized with the negative high-voltage pulse applied to the water-cooled coaxial sputtering target installed inside the tube. By moving the electro-magnet assembly along the tube's axial direction, the inner surface of the tube could be uniformly coated. The inner-surface coating system in this study used the tube itself as the vacuum chamber. The SS-304 tube's inner diameter was 22 mm and the length was ~1 m. A water-cooled Cu tube (sputtering target) of the outer diameter of 12 mm was installed inside of the SS tube (substrate) at the axial position. The 50 mm-long electro-magnet assembly was fed by a current pulse of 250 A at the frequency and pulse width of 100 Hz and 100 usec, respectively. The calculated axial magnetic field strength at the center was ~0.6 Tesla. The central Cu tube was synchronously driven by a HiPIMS power supply at the same frequency of 100 Hz as the electro-magnet and the applied pulse voltage was -1200 V with a pulse width of 500 usec. At 150 mTorr of Ar pressure, the Cu deposition rate of ~10 nm/min could be obtained. In this talk, a new method to sputter coat the inner surface of small-bore tubes would be presented and discussed, which might have broad industrial and military application areas.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2000년도 제18회 학술발표회 논문개요집
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• pp.213-213
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• 2000

Direct laser vaporization of transition-metal(Co, Ni)/graphite composite pellet produced single wall carbon naotubes(SWNT) in the condensing vapor in a heated flow cylinder-type tube furnace, Transition metal/graphite composite pellet target was made by mixing graphite, Co, and Ni in 98:1:1 atomic weight ratios, pressing the mixed powder, and curing it. The target was placed in a tube furnace maintained at 1200$^{\circ}C$ and Ar inert collision gas continuously flowed into the tube. The 2nd harmonic, 532nm wavelength light from Nd-YAG laser was used to vaporize the tube. The carbon nanotubes produced by the laser vaporization were accumulated on quartz tube wall. The raw carbon nanotube materials were purified with surfactants(Triton X-100) in a ultrasonicator. These carbon nanotubes were analyzed using SEM, XRD, and Raman spectroscopic method. The carbon nanotube growth on the Ni-patterned Si substrate was investigated by the CVD process. Transition-metal, Ni and CH4 gas were used as a catalyst and a reactant gas, respectively. The structure and the phonon frequencies of the carbon nanotubes formed on the patterned Si substrate were measured by SEM and Raman spectrometer.

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2008년도 하계학술발표대회 논문집
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• pp.663-668
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• 2008

This study was carried out solar heating system design for district heating and it's the performance analysis by experiment. This experimental system was installed in Bundang district heating area in the end of 2006. The flat plate and vacuum tube solar collector are combined in one system. So district heating water is heated first by flat plate solar collector and than by vacuum tube solar collector. This solar heating system has not a solar buffer tank and is operating with variable flow rate to obtain a setting temperature of $90{\sim}95^{\circ}C$. As a result, the daily solar thermal collection efficiency is about 30 to 40% for the plate type and 50 to 55% for the vacuum tube solar collector. It varied especially depend on the weather condition like as solar radiation and ambient temperature. This variable flow rate system can be also reduced much pumping power more than 50%.

• 한국태양에너지학회 논문집
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• 제24권3호
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• pp.27-38
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• 2004

A numerical investigation has been carried out for a solar system, which consists of all glass solar vacuum tubes Water is heated as it flows through the coaxial fluid conduit inserted in each tube. The space between the exterior of the fluid conduit and the glass tube is filled with antifreeze solution. This is to facilitate heat transfer from the solar heated absorber surface to water and to prevent the functional problems due to freezing in frigid weather conditions. A one-dimensional steady state model is fully described which will be used to develop three-dimensional model using STAR-CD. These models could be used efficiently in designing all-glass solar collector tubes with different geometrical parameters other than those considered in the present analysis. Results show good agreement when compared with other experimental data demonstrating the reliability of the present model.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2006년도 춘계학술대회
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• pp.567-570
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• 2006

A numerical study has been carried out for a solar water heater which consists of double skin solar vacuum tubes. Water is heated as it flows through the coaxial fluid conduit inserted in each tube. The space between the exterior of the fluid conduit and the glass tube is tilled with antifreeze solution. This is to facilitate heat transfer from the solar heated absorber surface to water and to prevent the functional problems due to freezing in frigid weather conditions. A one-dimensional steady state model is fully described which will be used to develop three-dimensional model using STAR-CD. These models could be used efficiently in designing double skin solar collector tubes with different geometrical parameters other than those considered in the present analysis. Results show a good agreement when compared with other experimental data demonstrating the reliability of the one-dimensional model employed.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2016년도 추계학술대회 논문집
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• pp.187-187
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• 2016

진공 압력에 따른 플라즈마 발생의 관계, 전압에 따른 방전 밝기, gas와 방전 전극에 따른 플라즈마 색의 변화 등 실험을 통하여 학부생들에게 진공 시스템과 플라즈마의 이해도를 높이기 위해 Geissler tube cart를 제작하였다. Pump는 TMP station (PFEIFFER Vacuum Hi Cube ECO 80)을 사용하였으며 reducer를 이용하여 CF-4.5"에서 CF-2.75" adaptor를 설치, gate valve를 연결하여 진공도를 조절 할 수 있게 하였으며, 5-way를 이용하여 왼쪽은 gas line, 정면 view port, 상단 geissler tube, 후면 compact full range gauge를 설치하였고, cart 제작 결과를 Fig. 1에 나타내었다. Geissler tube의 수치모델은 Fig. 2에 나타내었다. 저진공(<10-3 Torr) 영역부터 고진공(<10-4 Torr) 영역까지 진공도에 따른 방전을 관찰 할 수 있으며, 표면과 플라즈마 사이의 전위 변화에 따른 쉬스(sheath) 관찰, trans 와 slidacs를 이용하여 전압 조정이 가능하기 때문에 전압에 따른 방전 관찰과 gas line을 통한 gas 주입에 따른 색의 변화를 관찰이 가능하도록 설계하였다.

• 한국진공학회지
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• 제11권2호
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• pp.119-126
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• 2002

Hollow cathode discharge(HCD)에서 알곤 기체를 완충 기체로 사용하여 전류 변화에 따른 광검류 신호를 측정하였다. 광검류 신호는 방전의 전기 전도도의 증가 또는 감소에 의해 나타나며 전기 전도도의 변화는 전자 충돌에 의한 이온화율의 변화에 의해 일어난다. 낮은 방전 전류에서 광검류 신호는 가장 낮은 준안정 준위 원자의 밀도 변화와 밀접한 관계가 있다는 결론을 얻었다.

• 한국정밀공학회지
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• 제23권10호
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• pp.103-112
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• 2006

This paper describes a theoretical analysis and experimental verification on the performances of a vacuum-compatible air bearing, which is designed with a cascaded exhaust scheme to minimize the air leakage in a vacuum environment. The design of the vacuum-compatible air bearing equipped with the differential exhaust system requires great care because several design parameters, such as the number of exhaust stages, diameter of exhaust tube, pumping speed of a vacuum pump, and bearing clearance greatly influence the air leakage and thus degree of vacuum. In this study, a performance analysis method was proposed to estimate the performances of the air bearing, such as load capacity, stiffness, and air leakage. Results indicate that the load capacity and stiffness of the air bearing was improved as its boundary pressure, which was determined by the $1^{st}$ exhaust method, was lowered, and the dominant factors on the chamber's degree of vacuum were the number of exhaust stages, exhaust tube diameter and bearing clearance. A vacuum chamber and air bearing stage using porous pad were fabricated to verify the theoretical analysis. The results demonstrate that chamber pressure up to an order of $10^{-3}$ Pa was achieved with the air bearing stage operating inside the chamber, and this analysis method was valid by comparing predicted values with experimental data, for the mass flow rates from the porous pad, and pressures at each exhaust port and chamber, respectively.