• Journal of Energy Engineering
• /
• v.2 no.1
• /
• pp.68-74
• /
• 1993

In order to maximize the utility of vacuum residue, supercritical solvent extraction technique where n-pentane was used as a supercritical solvent was applied to obtain deasphalted oil from vacuum residue. Oil-extraction yield at various temperatures and pressures and the contents of metal complex and sulfur of extracted oil were investigated. In supercritical state, extraction yield of deasphalted oil was found to be strongly dependent on the n-pentane density, and the metal complex content of extracted oil was effectively lowered when compared with that of vacuum residue. However, the sulfur content of extracted oil showed little difference when compared with that of vacuum residue.

• 한국연소학회:학술대회논문집
• /
• 2004.06a
• /
• pp.207-214
• /
• 2004

Extra heavy vacuum residue oil has advantage as the fuel of a power plant in reducing the cost of power generation. Numerical study is conducted by the KIVA code to understand combustion, heat transfer and flow field characteristics in the test reactor. The combustion model of pulverized coal particles is adopted as the combustion process of extra heavy oil is similar to that of coal. As an initial phase of investigation parametric study is performed with respect to SMD and spray angle of injected spray droplets.

• Proceedings of the Korea Society for Energy Engineering kosee Conference
• /
• 2002.11a
• /
• pp.171-184
• /
• 2002

Approx. 200,000 bpd vacuum residue oil is produced from oil refineries in Korea. These are supplying to use asphalt, high sulfur fuel oil, and upgrading at the residue hydro-desulfurization unit. Vacuum residue oil has high energy content, however high sulfur content and high concentration of heavy metals represent improper low grade fuel. To meet growing demand for effective utilization of vacuum residue oil from refineries, recently some of the oil refinery industries in Korea, such as SK oil refinery and LG Caltex refinery, have already proceeded feasibility study to construct 435-500 MWe IGCC power plant and hydrogen production facilities. Recently, KIER(Korea Institute of Energy Research) are studing on the Vacuum Residue gasification process using an oxygen-blown entrained-flow gasifier. The experiment runs were evaluated under the reaction temperature : 1,100~1,25$0^{\circ}C$, reaction pressure : 1~6kg/$\textrm{cm}^2$G, oxygen/V.R ratio : 0.8~0.9 and steam/V.R ratio : 0.4-0.5. Experimental results show the syngas composition(CO+H$_2$) : 85~93%, syngas flow rate : 50~110Mm$^3$/hr, heating value : 2,300~3,000 ㎉/Nm$^3$, carbon conversion : 65~92, cold gas efficiency : 60~70%. Also equilibrium modeling was used to predict the vacuum residue gasification process and the predicted values were compared reasonably well with experimental data.

• Journal of Energy Engineering
• /
• v.12 no.1
• /
• pp.49-57
• /
• 2003

Approx. 200.000 bpd vacuum residue oil is produced from oil refineries in Korea, and is supplied to use asphalt, high sulfur fuel oil and for upgrading at the residue hydro-desulfurization unit. Vacuum residue oil has high energy content, however its high sulfur content and high concentration of heavy metals represent improper low grade fuel. To meet growing demand for effective utilization of vacuum residue oil from refineries, recently some of the oil refinery industries in Korea, such as SK oil refinery and LG Caltex refinery, have already proceeded feasibility study to construct 435~500 MWe IGCC power plant and hydrogen production facilities. Recently, KIER (Korea Institute of Energy Research) are studying on the Vacuum Residue gasification process using an oxygen-blown entrained-flow gasifier. The experiment runs were evaluated under the reaction temperature: 1.100~l,25$0^{\circ}C$, reaction pressure: 1~6 kg/$\textrm{cm}^2$G, oxygen/V.R ratio: 0.8~0.9 and steam/V.R ratio: 0.4~0.5. Experimental results show the syngas composition (CO+H$_2$): 85~93%, syngas flow rate: 50~l10 Nm$^3$/hr, heating value: 2,300~3,000 k㎈/Nm$^3$, carbon conversion: 65~92, cold gas efficiency: 60~70%. Also equilibrium modeling was used to predict the vacuum residue gasification process and the predicted values were compared reasonably well with experimental data.

• Journal of Energy Engineering
• /
• v.14 no.4 s.44
• /
• pp.268-276
• /
• 2005

Vacuum Residue (VR) combustion tests were carried out with a 20 kg/hr (fuel feed rate) small scale reactor. The nozzle used was a steam atomized, internal mixing type. Compared to heavy oil, vacuum residue used in this work is extremely high viscous and contains high percentages of sulfur, carbon residue and heavy metals. To ignite atomized VR particles, it was necessary to preheat the reactor, and it has been done with LP gas. The axial and radial gas temperature, major species concentrations and solid sample were analyzed when varying the fuel feed rate. The main reaction zone of atomized VR-air flame in a reactor was anticipated within about 1 m from the burner tip by considering the profiles oi gas temperature, species concentration and particle size measured along with the reactor. At downstream, the thermally, fully developed temperature distribution was obtained. SEM photographs revealed that VR carbon particles collected from the reactor are porous and have many blow-holes on the particle surface.

• Environmental Engineering Research
• /
• v.12 no.3
• /
• pp.109-117
• /
• 2007

The characteristics of carbonaceous particles collected from the combustion of Vacuum Residue (VR) in a test furnace have been investigated. The physical and chemical characterization includes particle size, scanning electron microscopy of the surface structure, measurement of porosity, surface area and density, EDX/XRD analyses and measurement of chemical composition. The studies show that the carbonaceous VR particles are very porous and spheroidal, and have many blow-holes on the surface. The particles become smaller and more sponge-like as the reaction proceeds. The present porosity of VR particles is similar to that of cenospheres from the combustion of heavy oil, and the majority of pores are distributed in macro-pores above $0.03\;{\mu}m$ in diameter. Measurements of pore distribution and surface area showed that the macro-pores contributed most to total pore volume, whereas the micro-pores contributed to total surface area.

• 한국연소학회:학술대회논문집
• /
• 2006.04a
• /
• pp.121-127
• /
• 2006

It has become inevitable to search for alternative fuels due to severe energy crisis these days. Use of alternative fuels, which are typically of lower quality, tends to increase environmental pollution, including formation of nitrogen oxides (NOx). In this paper performance of vacuum residue has been investigated experimentally as well as numerically in typical operating conditions of a furnace. Heat release reaction is modeled as sequential steps of devolatilization, simplified gas phase reaction and char oxidation as that for pulverized coal. Thermal and fuel NOx are predicted by conditional estimation of elementary reaction rates and are compared against measured experimental data. On the overall reasonable agreement is achieved for spatial distributions of major species, temperature and NOx for all test cases.

• Journal of the Korean Vacuum Society
• /
• v.7 no.3
• /
• pp.169-175
• /
• 1998

The plasma etching of polysilicon was performed with the HBr/$Cl_2/He-O_2$ gas mixture. The residual layers after photoresist strip were investigated using x-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM). The etch residue was identified as silicon oxide deposited on the top of the patterned polysilicon. In order to clarify the formation mechanism of the etch residue, the effects of various gas mixtures such as $Cl_2/He-O_2$and HBr/$Cl_2$were investigated. We found that the etch residue is well formed in the presence of oxygen, suggesting that the etch residue is caused by the reaction of oxvgen and non-volatile silicon halide compounds. Wet cleaning and dry etch cleaning processes were applied to remove the polysilicon etch residue, which can affect the electrical characteristics and further device processes. XPS results show that the wet cleaning is suitable for the removal of the etch residue.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2014.02a
• /
• pp.218.2-218.2
• /
• 2014

그래핀은 높은 전기 전도도와 열전도도, 기계적 강도를 가지고 있고 동시에 높은 전자이동도($200,000cm^2{\cdot}V{\cdot}^1{\cdot}s{\cdot}^1$) 특성을 갖는 물질로써 차세대 소재로 각광받고 있다. 하지만 그래핀을 소자에 응용하기 위해서는 전사공정과 lithography 공정 과정에서 발생되는 PMMA(Poly methyl methacrylate) residue를 완벽하게 제거해야 하는 문제점이 있다. 특히, lithography 공정 중 완벽하게 PMMA residue 가 제거되지 않고 잔류해 있을 경우에 소자의 life time, performance에 악영향을 준다는 보고가 있다. 이와같은 문제를 해결하기 위해 화학적 cleaning, 열처리를 통한 cleaning, 전류 인가에 의한 cleaning과 같은 방법들을 이용하여 그래핀의 PMMA residue를 제거하는 공정들이 보고되고 있지만, 화학적 cleaning 방법의 경우 chloroform 이라는 독성물질 사용으로 인해 산업적으로 응용이 어렵고, 열처리 방법은 전극 등의 금속이 $200^{\circ}C$ 이상의 높은 온도에서 장시간 노출될 경우 쉽게 손상을 입으며, 전류 인가에 의한 cleaning 방법은 국부적으로만 효과를 볼 수 있기 때문에 lithography 공정 후 PMMA residue를 효과적으로 제거하기에는 한계를 보이고 있다. 본 연구에서는 Ar을 이용하는 Ion beam 시스템을 통해 beam energy를 제어함으로써 PMMA residue를 효과적으로 제거하는 연구를 진행하였다. 최적화된 플라즈마 발생 조건을 찾기 위해 QMS(Quadrupole Mass Spectrometer)를 이용하여 입사하는 ion energy와 flux 양을 컨트롤 하였고, 250 W에서 최적화된 ion energy distribution 영역이 존재한다는 것을 확인할 수 있었다. 또한, 25 Gauss 정도의 electro-magnetic field를 이용하여 Ar의 ion energy를 10 eV 이하로 낮추어 damage를 최소화함으로써 효과적으로 그래핀을 cleaning 할 수 있었다. Cleaning과정에서 ion bombardment에 의해 발생한 damage는 $250^{\circ}C$에서 6시간 동안 annealing 공정을 거치면서 회복되는 것을 Raman spectroscopy의 D peak ($1335cm{\cdot}^1$) / G peak ($1572cm{\cdot}^1$) ratio 로 확인할 수 있었고, PMMA residue의 cleaning 여부는 G peak ($1580cm{\cdot}^1$)의 blue shift와 2D peak ($2670cm{\cdot}^1$)의 red shift를 통해 확인하였다. 그리고 AFM (Atomic Force Microscopy)을 이용하여 cleaning 공정과정에서 RMS roughness가 4.99 nm에서 2.01 nm로 감소하는 것을 관찰하였다. 마지막으로, PMMA residue의 cleaning 정도를 정량적으로 분석하기 위해 XPS (X-ray Photoelectron Spectroscopy)를 이용하여 sp2 C-C bonding이 74.96%에서 87.66%로 증가함을 확인을 할 수 있었다.

• Journal of Energy Engineering
• /
• v.17 no.1
• /
• pp.15-22
• /
• 2008

This study was carried out to investigate physical and chemical characteristics of the distillates and residue of Athabasca oilsand bitumen obtained from Canada, using a vacuum distillation unit. The distillates and residue produced from the vacuum distillation were characterized through atomic analysis, SARA analysis, and measurement of boiling point distribution, molecular weight, and API gravity. The vacuum distillation equipment consisted of a 6-litter volume vessel, a glass-packed column, a condenser, a reflux device, a flask fer collecting distillates, and a temperature controller. The cutting of distillates was performed with four steps under the condition of full vacuum and maximum temperature of $320^{\circ}C$. The results showed that the sulfur amount and average molecular weight of the distillates were significantly reduced compared to those of oilsand bitumen. As the cutting temperature increased, the hydrogen amount decreased but the sulfur amount and average molecular weight increased in the distillates.