• Title/Summary/Keyword: vacuum heat treatment

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Scale-up Polymerization of L -Lactide in Supercritical Fluid (초임계 유체에서 L-Lactide의 Scale-up 중합)

  • Prabowo, Benedictus;Kim, Se-Yoon;Choi, Dong-Hoon;Kim, Sao-Hyun
    • Polymer(Korea)
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    • v.35 no.4
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    • pp.284-288
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    • 2011
  • For the purpose of the pre-industry production of poly(L-lactide) (PLLA) and full understanding of the supercritical polymerization system, large scale polymerization of L-iactide initiated by 1-dodecano/stannous 2-ethyl-hexanoate (DoOH/Sn(Oct)$_2$) was carried out in supercritical chlorodifluoromethane under various reaction conditions (time, temperature and pressure)and reactants (monomer and supercritical solvent) concentrations. A 3 L sized-reactor system was used throughout this study. The monomer conversion increased to 72% on increasing reaction time to 5 h. The molecular weight of PLLA product also increased to 68000 g/moi over the same period. An increase in monomer concentration resulted in a higher molecular weight, up to 144000 g/mol and 97% of monomer conversion. Raising the reaction pressure from 130 to 240 bar also resulted in an increased monomer conversion and molecular weight. To increase heat resistivity of PLLA, methanol treatment and heat-vacuum methods were evaluated. Both of them successfully improved the heat resistivity property of PLLA.

Dimensional Stability and Mechanical Properties of Citric Acid Impregnated Samama Wood (Anthocephalus macrophyllus (Roxb) Havil) at High Curing Temperatures

  • Sarah AUGUSTINA;Sari Delviana MARBUN;SUDARMANTO;NARTO;Deazy Rachmi TRISATYA;Eko Budi SANTOSO;Dhimas PRAMADANI;Nanda Nur AFNI;Tushliha Ayyuni FARIHA;Gabriel Wiwinda L. TOBING;Wasrin SYAFI'I;Tekat Dwi CAHYONO;Eka NOVRIYANTI;Muhammad BULA;Adik BAHANAWAN;Prabu Satria SEJATI;Nam Hun KIM;Wahyu DWIANTO;Philippe GERARDIN
    • Journal of the Korean Wood Science and Technology
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    • v.51 no.6
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    • pp.431-446
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    • 2023
  • Samama wood (Anthocephalus macrophyllus (Roxb) Havil) is a fast-growing and lesser-utilized wood species that has inferior properties; therefore, its quality needs to be improved. This research aimed to determine the effect of citric acid impregnation at high curing temperatures on the dimensional stability and mechanical properties of wood. Citric acid solution with 10% concentration (w/w) was impregnated into wood samples by vacuum-pressure method (-0.5 cmHg, 30 min; 0.7 MPa, 3 h), followed by curing process at 140℃, 160℃, and 180℃ of temperature for 1 h. In comparison, the other wood samples were heat treated at the same temperatures and time. The results showed that the increase in curing and heat temperatures for both treatments were directly proportional to the dimensional stability, but inversely proportional to the mechanical properties. Citric acid impregnated had higher density, dimensional stability, and mechanical properties, except for modulus of rupture, than that of heat treatment. The optimum temperature is suggested at 160℃ in both treatments.

Application of Pulsed Laser Deposition Method for ZnO Thin Film Growth and Optical Properties (ZnO 박막 성장과 광학적 특성 분석을 위한 펄스 레이저증착(PLD)방법 적용)

  • Hong Kwang Joon;Kim Jae Youl
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.14 no.2
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    • pp.33-41
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    • 2005
  • ZnO epilayer was synthesized by the pulsed laser deposition(PLD) process on Al$_2$O$_3$ subsorte after irradiating the surface of ZnO sintered pellet by ArF(193nm) excimer laser. The epilayers of ZnO were achieved on sapphire(A1203) substrate at the 境mperature of 400$^{circ}$C. The crystalline structure of epilayer was investigated by the Photoluminescence and double crystal X-ray diffraction(DCXD). The carrier density and mobility of ZnO epilayer measure with Hall effect by van der Pauw mothod are $8.27\times$1016cm$^{-3}$ and 299 cm$^{2}$/V$\cdot$s at 293 K respectively, The temperature dependence of the energy band gap of the ZnO obtained from the absorption spectra was well described by the Varshni's relation, E$_g$(T)= 3.3973 eV - ($2.69\times$ 10$^{-4}$ eV/K)T$^{2}$/(T + 463K). After the as-grown ZnO epilayer was annealed in Zn atmospheres, oxygen and vaccum the origin of point defects of ZnO atmospheres has been investigated by the photoluminescence(PL) at 10K. The native defects of V$_{Zn}$, V$_{O}$, Zn$_{int}$, and O$_{int}$ obtained by PL measurements were classified as a donor or acceptor type. In addition we concluded that the heat-treatment in the oxygen atmosphere converted ZnO thin films to an optical p-type. Also, we confirmed that vacuum in ZnO/Al$_2$O$_3$ did not firm the native defects because vacuum in ZnO thin films existed in the form of stable bonds.

Effects of Carburizing Process on Sliding wear Behavior of Carburized SCM420H Steel (침탄처리한 SCM420H의 미끄럼 마모 특성에 미치는 침탄 조건의 영향)

  • Lee, Han-Young;Lee, Kyu-Hyun
    • Tribology and Lubricants
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    • v.36 no.1
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    • pp.18-26
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    • 2020
  • The effects of the carburizing process on the sliding wear behavior of SCM420H steel have been investigated. In particular, the effects of grain boundary corrosion observed in the surface layer after gas carburizing and the effects of hardness of the carburized cases after heat-treatment on the sliding wear properties were examined. Pin specimens carburized by two methods (gas carburizing and vacuum carburizing) were tempered at two temperatures of 180℃ and 400℃ after oil-quenching, respectively. Sliding wear tests were carried out against heattreated SKH51 steel at several sliding speeds using a pin-on-disc type test machine. As results, it can be found that there is no difference in the wear behavior between the pins carburized using two methods. This implies that the grain boundary corrosion that formed in the surface layer after gas carburizing has no effect on the sliding wear behavior of carburized SCM420H steels. Additionally, there is no significant difference in the wear behavior between carburized pins tempered at 400℃ and at 180℃ after oil-quenching, regardless of the carburizing method. This is because carburized pins tempered at 400℃ have a troostite structure, which exhibits higher tribochemical reactivity even though its hardness is lower than that of martensite structure. In this respect, it can be considered that good wear resistance of carburized cases is maintained at least until the effective case depth.

Effects of $WSi_x$, thickness and F concentration on gate oxide characteristics in tungsten polycide gate structure (Tungsten polycide gate 구조에서 $WSi_x$ 두께와 fluorine 농도가 gate oxide 특성에 미치는 영향)

  • 김종철
    • Journal of the Korean Vacuum Society
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    • v.5 no.4
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    • pp.327-332
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    • 1996
  • In this study, the effects of $WSi_x$, thickness and fluorine concentration in tungsten polycide gate structure on gate oxide were investigated. As $WSi_x$, thickness increases, gate oxide thickness increases with fluorine incorporation in gate oxide, and time-to-breakdown($T_{BD,50%}$) of oxide decreases. The stress change with $WSi_x$ thickness was also examined. But it is understood that the dominant factor to degrade gate oxide properties is not the stress but the fluorine, incorporated during $WSi_x$ deposition, diffused into $WSiO_2$ after heat treatment. In order to understand the effect of fluorine diffusion into oxidem fluorine ion implanted gates were compared. The thickness variation and $T_{BD,50%}$ of gate oxide is saturated over 600 $\AA$ thickness of $WSi_x$. The TEM and SIMS studies show the microstructure less than 600 $\AA$ thickness is dense and flat in surface. However, over 600$\AA$, the microstructure of $WSi_x$ is divided into two parts: upper porous phase with rugged surface and lower dense phase with smmoth interface. And this upper phase is transformed into oxygen rich crystalline phase after annealing, and the fluorine is captured in this layer. Therefore, the fluorine diffusion into the gate oxide is saturated.

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Fabrication and Characteristics of $CuInS_2$ thin films produced by Vacuum Evaporation (진공증착에 의해 제조된 $CuInS_2$ 박막의 제작 및 특성)

  • Yang, Hyeon-Hun;Jeong, Woon-Jo;Kim, Duck-Tae;Park, Gye-Choon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.04c
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    • pp.15-17
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    • 2008
  • $CuInS_2$ thin films were synthesized by sulpurization of Cu/In Stacked elemental layer deposited onto glass Substrates by vacuum furance annealing at temperature 200[$^{\circ}C$]. And structural and electrical properties were measured in order to certify optimum conditions for growth of the ternary compound semiconductor $CuInS_2$ thin films with non-stoichiometry composition. $CuInS_2$ thin film was well made at the heat treatment 200[$^{\circ}C$] of SLG/Cu/In/S stacked elemental layer which was prepared by thermal evaporator, and chemical composition of the thin film was analyzed nearly as the proportion of 1 : 1 : 2. Physical properties of the thin film were investigated at various fabrication conditions substrate temperature, annealing and temperature, annealing time by XRD, FE-SEM and hall measurement system. At the same time, carrier concentration, hall mobility and resistivity of the thin films was $9.10568{\times}10^{17}[cm^{-3}]$, 312.502[$cm^2/V{\cdot}s$] and $2.36{\times}10^{-2}[{\Omega}{\cdot}cm]$, respectively.

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Palm-Size-Integrated Microwave Power Module at 1.35-GHz for an Atmospheric Pressure Plasma for biomedical applications

  • Myung, C.W.;Kwon, H.C.;Kim, H.Y.;Won, I.H.;Kang, S.K.;Lee, J.K.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.498-498
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    • 2013
  • Atmospheric Pressure Plasmas have pioneered a new field of plasma for biomedical application bridging plasma physics and biology. Biological and medical applications of plasmas have attracted considerable attention due to promising applications in medicine such as electro-surgery, dentistry, skin care and sterilization of heat-sensitive medical instruments [1]. Traditional approaches using electronic devices have limits in heating, high voltage shock, and high current shock for patients. It is a great demand for plasma medical industrial acceptance that the plasma generation device should be compact, inexpensive, and safe for patients. Microwave-excited micro-plasma has the highest feasibility compared with other types of plasma sources since it has the advantages of low power, low voltage, safety from high-voltage shock, electromagnetic compatibility, and long lifetime due to the low energy of striking ions [2]. Recent experiment [2] shows three-log reduction within 180-s treatment of S. mutans with a low-power palm-size microwave power module for biomedical application. Experiments using microwave plasma are discussed. This low-power palm-size microwave power module board includes a power amplifier (PA) chip, a phase locked loop (PLL) chip, and an impedance matching network. As it has been a success, more compact-size module is needed for the portability of microwave devices and for the various medical applications of microwave plasma source. For the plasma generator, a 1.35-GHz coaxial transmission line resonator (CTLR) [3] is used. The way of reducing the size and enhancing the performances of the module is examined.

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The effect of the heat treatment of MOCVD Cu thin film on electromigration (MOCVD Copper 박막의 열처리가 Electromigration 특성에 미치는 영향 연구)

  • 이원석;배성찬;손승현;최시영
    • Journal of the Korean Vacuum Society
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    • v.11 no.4
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    • pp.194-200
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    • 2002
  • MOCVD(metal-organic chemical vapor deposition) copper thin film was annealed at various conditions and the eletrical properties and micro-structures were investigated to find the optimal annealing condition and its effect. Cu thin film annealed at Ar 1 torr, $400^{\circ}C$ had the most improved resistivity of 1.98 $\mu\Omega$cm, and texture; the ratio of $I_{(111)}/I_{(200)}$ was varied from 2.03 to 3.11, and Cu thin film annealed at Ar 1 torr, $450^{\circ}C$ had the largest grain size and uniformity. After the annealing, the EM(electromigration) test was followed to ensure the improved properties by annealing. Compare to other conditions, Cu patterns annealed at Ar 1 torr, $400 ^{\circ}C$ had the most improved properties when it came to the EM resistance, which was due to the low resistivity, the preferential evolution of texture to (111) plane, and the reduction of surface roughness of annealed copper film.

Fabrication Thermal Responsive Tunable ZnO-stimuli Responsive Polymer Hybrid Nanostructure

  • Lee, Jin-Su;Nam, Sang-Hun;Yu, Jung-Hun;Hwang, Ki-Hwan;Ju, Dong-Woo;Jeon, So-Hyoun;Seo, Hyeon-Jin;Yun, Sang-Ho;Boo, Jin-Hyo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.429.2-429.2
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    • 2014
  • ZnO nanowire is known as synthesizable and good mechanical properties. And, stimuli-responsive polymer is widely used in the application of tunable sensing device. So, we combined these characteristics to make precise tunable sensing devise. In this work, we investigate the dependence of ZnO nanowire alignment and morphology on si substrate using nanosphere template with various conditions via hydrothermal process. Also, pH-temperature dependant tuning ability of nanostructure was studied. The brief experimental scheme is as follow. First, Zno seed layer was coated on a si wafer ($20{\times}20mm$) by spin coater. And then $1.15{\mu}m$ sized close-packed PS nanospheres were formed on a cleaned si substrate by using gas-liquid-solid interfacial self-assembly method. After that, zinc oxide nanowires were synthesized using hydrothermal method. Before the wire growth, to specify the growth site, heat treatment was performed. Finally, NIPAM(N-Isopropylacrylamide) was coated onto as-fabricated nanostructure and irradiated by UV light to form the PNIPAM network. The morphology, structures and optical properties are investigated by FE-SEM(Field Emission Scanning electron Microscopy), XRD(X-ray diffraction), OM(Optical microscopy), and WCA(water contact angle).

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Comparing the Passivation Quality of Ozone and H2O Oxidant of Atomic Layer Deposited Al2O3 by Post-annealing in N2 and Forming Gas Ambients for Passivated Emitter and Rear Cell (PERC)

  • Cho, Young Joon;Chang, Hyo Sik
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.462-462
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    • 2014
  • The effect of rear passivation for passivated emitter and rear cell (PERC) using ozone and H2O oxidant of atomic layer deposited (ALD) Al2O3 was studied by post-annealing in N2 and forming gas ambients. Rear surface of PERC solar cell was passivated by Al2O3 grown by ALD with ozone and H2O oxidant. Al2O3 grown by ALD with ozone oxidant has been known to have many advantages, such as lower interface defects, low leakage current density. Its passivation quality is better than Al2O3 with H2O. Al2O3 layer with 10 nm and 20 nm thickness was grown at $150^{\circ}C$ with ozone oxidant and at $250^{\circ}C$ with H2O oxidant. And then each samples were post-annealled at $450^{\circ}C$ in N2 ambients and at $850^{\circ}C$ in forming gas ambients. The passivation quality was investigated by measuring the minority carrier lifetime respectively. We examined atomic layer deposited Al2O3 such as growth rate, film density, thickness, negative fixed charge density at AlOx/Si interface, and reflectance. The influences of process temperature and heat treatment were investigated using Sinton (WCT-120) by Quasi-Steady State Photoconductance (QSSPC) mode. Ozone-based ALD Al2O3 film shows the best carrier lifetime at lower deposition temperature than H2O-based ALD.

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