• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2011.11a
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• pp.970-972
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• 2011

The vacuum chamber pressure was investigated according to the second throat exhaust diffuser entrance diameter. The sizes of diffuser entrance were changed three cases, and each case was computed by using CFD. Also in order to relatively compare the vacuum chamber pressure the Euler equation was adopted. According to the results, as the size of diffuser entrance was increased it was observed that the vacuum chamber pressure was decreased.

• Proceedings of the Korean Vacuum Society Conference
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• 1993.07a
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• pp.37-37
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• 1993

• Proceedings of the Korean Vacuum Society Conference
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• 1994.06a
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• pp.39-39
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• 1994

• Proceedings of the Korean Vacuum Society Conference
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• 1992.07a
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• pp.111-112
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• 1992

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.195-195
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• 2015

반도체 제조 시 ohmic contact을 형성하고, barrier metal layer형성을 위해 NH3 기체를 사용하는 rapid thermal nitridation (RTN)은 반도체 공정에 있어 매우 중요한 핵심 기술이다. 그러나 공정 진행 시 발생하는 공정 부산물에 의한 chamber오염으로 인해 매우 정확히 입사 되어야 할 thermal energy의 controllability가 저하되고 있어, 미세 공정능력 구현의 한계에 부닥치고 있다. 본 연구에서는 quartz plate liner를 적용하여 RTN 공정에서 발생하는 공정 부산물인 ammonium chloride (NH4Cl)의 chamber 표면 증착을 최소화하였고, 공정 진행 온도의 controllability를 확보하였다.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.49 no.5
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• pp.407-415
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• 2021

The performance of satellite parts must be verified under the space orbit environment before the launch. This paper develops a model formula considering the thermal environment such as conduction, radiation, heat loss and internal heating between satellite parts and a small thermal vacuum chamber for thermal vacuum tests. System identification is carried out using test data from 20 recent thermal vacuum tests conducted by the Korea Aerospace Research Institute. It is verified that the model formula and the identification results are valid, except when the heating of the functional test of the test specimen is not constant.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2005.11a
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• pp.46-55
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• 2005

For the sea-level performance test of rocket motor designed to operate in the upper atmosphere, ejectors with no induced secondary flow are generally used, which serves dual purposes of evacuating the test cell and performing as a supersonic exhaust diffuser (SED). The main concern of this research is to simulate starting transients in order to visualize evolution of internal shock structures in SED with different initial cell (vacuum chamber) pressures. RANS code with low Reynolds $k-\varepsilon$ turbulence model was employed for these computations. Numerical results were compared with the pressure measurements previously performed [Proceedings of 2004 Annual Conference, KIMST], and showed good agreements with pressure-time history of measured data. In the case of low vacuum chamber pressure, abrupt impingement of the under-expanded supersonic jet from the nozzle onto the diffuser wall was observed, whereas initial impingement point was located downstream and moved slowly upstream in the case of non-vacuum chamber pressure. In spite of initially dissimilar evolution of shock structures, iso-mach contour revealed that the steady shock structures had little difference except the location of flow separation and normal shock.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2018.06a
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• pp.76-76
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• 2018

LCD 디스플레이 크기는 점차 대형화를 이루면서, 현재 LCD 디스플레이 크기는 3,000*3,320mm 크기까지 증가하여 개발이 활발이 이루어지고 있다. 디스플레이의 크기가 증가함에 따라 제조 장비의 크기도 증가되어야 하므로, LCD 디스플레이 CVD 공정에 사용되는 4,200*3,300mm 크기의 대형 Aluminium Vacuum Chamber 에 피막두께 $15{\mu}m$ 이상을 구현함과 동시에 두께 균일도가 우수하며 염수분무시험으로 168시간 이상의 내식성 확보가 가능한 양극산화조건 개발을 위하여 양극산화 피막의 각종 특성 평가를 실시하였다. 양극산화 피막 두께 측정은 와전류(Eddy Current)의 원리를 이용한 비파괴식 두께 측정법(ISO 2360, ASTM D 7091)을 적용하였으며, 염수분무시험 방법은 (KS D 9502)을 적용하였으며, HCl bubble stream 시험 방법은 HCl 5% 농도를 투명 아크릴 튜브에 채운후 bubble stream 을 종점으로 하여 평가를 실시하였으며, 열충격을 이용한 도금밀착성(KS D 0254), 도장접착력(ASTM D 3359) 등을 이용하여 전해조건 및 전해액 농도에 따른 피막 특성 비교평가를 실시하여 최적의 대형 Aluminium Vacuum Chamber 양극산화 전해 조건을 개발하여 4,200*3,300mm 크기의 대형 Aluminium Vacuum Chamber 제조를 목적으로 하였다.

• Analytical Science and Technology
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• v.25 no.3
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• pp.164-170
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• 2012

Cyanoacrylate fuming mehod is effective for latent fingerprints developing on non-porous surfaces. In this study, we investigated optimal conditions for latent fingerprint development using cyanoacrylate fuming method in vacuum chamber. The effects of temperature, relative humidity, fuming method and processing time were checked throughly. The amount of evaporated cyanoacrylate was increased at higher temperature, but cyanoacrylate polymerization on the fingerprint ridge was best at $30^{\circ}C$. With a relative humidity of 40% to 50% conditions, good quality of fingerprints were developed. If a relative humidity is lower than 30% or higher than 60%, polymerization rate of cyanoacrylate monomers on the fingerprint ridge was decreased. It was identified that application of $OMEGA-PRINT^{TM}$ dispersal pad or cotton ball with sodium hydroxide fuming method in vacuum chamber was more effective than natural fuming method. We found that cyanoacrylate processing time in vacuum chamber did not have more significant than relative humidity.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.11
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• pp.138-147
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• 2001

Alignment systems are frequently used under various semiconductor manufacturing environment. Particularly in PDP(Plasma Display Panel) manufacturing process, the alignment system is applied to the combining and sealing processes of the upper and lower glass panels of PDP, where these processes are performed in the vacuum chamber of high vacuum and high temperature. In this paper, the XYΘ-alignment stage is developed to align PDP panels. Because of high vacuum and high temperature environment, the alignment chamber has been designed to isolate the inner part of the alignment chamber from the outer environment of high vacuum and high temperature, in which every part of the alignment stage is inserted. As it is difficult to attach feedback sensors to the alignment stage in the alignment chamber, the alignment stage is implemented with the open loop algorithm, where the parallel link structure has been designed using step-motors and ball-screws for structural simplicity. The kinematic analysis is performed to drive the parallel link structure, based on the experiments of actuation-compensation of the alignment stage. For the error compensation, the hyperpatch model has been used to model the errors. From the experiments, the positional accuracy of the alignment stage can be improved significantly.