• Journal of the Korean Society for Precision Engineering
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• v.25 no.11
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• pp.45-51
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• 2008

Successive micro-scale V-grooves and a grid of pyramids were machined by elliptical vibration tufting (EVC) to investigate feasibility of using EVC as an alternative method of creating micro-molds to photo-lithography and electroforming, which have been commonly employed. An elliptical vibration grooving machine was developed which consists of two orthogonally-arranged piezoelectric actuators, a diamond cutting tool, and a motorized xyz stage. The micro-scale features were machined on materials of copper, duralumin, nickel, and hastelloy and it was found that EVC significantly reduces cutting resistance and prohibits generation of side burrs and rollover burrs, thus resulting in improving machining qualify of micro-molds in ail experimented workpiece materials.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.9 s.174
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• pp.27-33
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• 2005

This study deals with the truing of diamond wheel fur the manufacture of micro v-shaped grooves with fine sharp edges in the grinding. Fine micro v-shaped grooves are key components to fabricate LGP(light guide plate), optical fiber connector and so on. Conventional v-shaped groove methods such as etching and lithography are difficult to make grooves with accuracy and cutting by lathe is difficult to select target materials. Therefore, as a preliminary stage to developing the grinding technology that will be expected fabrications for micro 3-dimensional structure of high effectivity and accuracy and freed up the restrictions of machinability to the materials for micro v-shaped grooves, truing is carried out with resin bond diamond wheel and electroforming diamond wheel using a cup-type truer. From the experimental results, it is found that the effects according to working direction of the cup-type truer and the restrainable methods of plastic deformation that is generated at wheel edge are examined. As a result, fine micro v-shaped diamond wheel was obtained, which are applicable to micro grinding for optical devices.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.1 s.94
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• pp.68-74
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• 1999

One of the recent changes in machining technology is rapid application of micro- and high precision grinding processes. A fine groove generation is necessary for the fabrication of optic, electronic and semiconductor parts, and achieved by chemical or mechanical processes. Slot grinding is very efficient for the generation of micro ordered groove with hard and brittle materials. As slot grinding is continuous, the ground depth become gradually shallow because of wheel wear. The form accuracy become worse from the increase of ground slot width by the loading phenomena at wheel side, results on chipping damage of the workpiece. The experiments achieve to the enhancement of the form accuracy and chipping free of the brittle materials using V shaped cast iron bonded diamond wheels. In this study we focused on the investigation of the effect of the high pressure air jet on the grinding characteristics. As a results, we found that the high pressure air jet is very effective on the reductions of the wheel wear, enhancement of the form accuracy.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.11
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• pp.52-58
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• 2007

A cutting device capable of generating various shapes of the cyclic elliptical trajectory of a cutting tool was proposed and micro v-grooving experiments were performed to investigate the characteristics of elliptical vibration cutting (EVC). The proposed cutting device is comprised of a pair of parallel piezoelectric actuators with which harmonic voltages of varying phase difference and magnitude are supplied, creating various shapes of the elliptical tool path. The attributes of the elliptical locus involving the direction of the axis of an ellipse, the rotational direction and amplitudes of a trajectory were fine-tuned for stable operation of the EVC. The EVC characteristics performed with brass and copper revealed reduction in the cutting resistance and suppression of burr formation, resulting in the enhancement of form accuracy of machined micro-features. While the effect of the EVC increases with the increase of excitation frequency and the amplitude, it is found that a change in the cutting force decreases as the amplitude of an elliptical locus increases.

• Proceedings of the KSME Conference
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• 2003.11a
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• pp.622-627
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• 2003

A numerical study is made of a flow in a cylinder with a rotating grooved endwall disk. The aim is to describe differences in the flow fields when there is concentrically-grooved obstacle characterized by amplitude(a) and wave number(N). The Reynolds number(Re) is varied from $10^{3}$ to $10^{4}$ and the aspect ratio(Ar) fixed to 1.0 for the most part of the simulation. For the various cases of amplitude(a) and wave number(N), numerical results are acquired. As the endwall groove roughness increases until certain limit, the interior azimuthal velocity component(v) increases drastically. But over the limit, the swirl motion chararcterized by velocity v decreases and finally it approaches much alike Ar=1.0-a case. The reason of activating swirl motion is based on increasing of torque transported by endwall disk. Torque coefficients($C_{T}$) are aquired for the various (a,N,Re) combinations and the limiting phenomena of swirl motion activation is explained.

• Journal of the Korean Society for Precision Engineering
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• v.10 no.2
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• pp.40-47
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• 1993

To diversify the area of application of UBET to the analysis of ring rolling which produces rings having more complex cross-sectional configuration, an element of triangular cross-section has been introduced and the corresponding kinematically admissible velocity field has been derived while considering the material flow between neighboring elements. The theoretical perdictions in roll torque and profile formation show good agreement with the experiments. The effect of process parameters such as feed rate and taper angle of the roll groove has been discussed.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.220-220
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• 2010

펄스 직류 $BCl_3$ 플라즈마를 이용하여 GaAs와 AlGaAs의 건식식각을 연구하였다. 공정의 주요 변수는 펄스 직류 전압(350~550V), 펄스 직류 시간($0.4{\sim}1.2{\mu}sec$.), 펄스 직류 주파수(100~250kHz)이었다. 식각 실험 후 샘플의 식각률, 식각 선택도, 표면 형상을 비교, 분석하였다. 또한, 광학 발광 분석기(Optical Emission Spectroscopy)를 이용하여 식각하는 동안 플라즈마 방전 특성을 분석하였다. 표면 단차 측정기(Alpha-step IQ, Tencor)로 식각 깊이를 측정해 식각률을 계산하였다. 표면 거칠기 또한 단차 측정기의 표면 거칠기 프로그램을 이용하여 분석하였다. 식각 벽면과 표면 상태는 주사전자현미경(Field-emission scanning electron microscopy)을 이용하여 관찰하였다. 분석 결과는 1) 펄스 직류의 전압이 증가하면 전극에 걸리는 파워가 올라가고 GaAs와 AlGaAs의 식각률도 증가하였다. 2) 76 mTorr 공정 압력, $0.7{\mu}sec$. 펄스 직류 시간과 200 kHz 주파수 일 때 10 sccm $BCl_3$ 펄스 직류 플라즈마에서 GaAs와 AlGaAs 둘 다 약 $0.4{\mu}m/min$ 이상의 식각 속도를 보여주었다. 3) 식각 선택도는 펄스 직류의 전압이 높아지면 증가하였고, 펄스 직류 주파수의 증가도 공정 파워와 GaAs와 AlGaAs의 식각률을 증가시켰다. 4) 그러나 펄스 직류 주파수가 150kHz 이하일 때에는 GaAs와 AlGaAs가 거의 식각되지 않았다. 5) 표면 거칠기는 펄스 직류 주파수가 증가하면 미세하게 좋아졌고 플라즈마는 펄스 직류 주파수가 100~250kHz 일 때 생성되었다. 6) 펄스 직류 시간의 증가는 공정 파워, 식각률, 식각 선택도 모두의 증가를 가져왔다. 7) 광학발광분석기(OES) 데이타는 $BCl_3$ 플라즈마에서 넓은 범위(450~700nm)에서의 염소(Cl) 분자 피크를 나타내었다. 8) 전자 현미경 사진은 펄스 직류 전압이 400 V보다 550 V 일 때보다 더 이방성(Anisotropic)측면과 부드러운 표면을 나타냈지만, 조금의 홈(Trench)이 발견되었다. 결론적으로 펄스 직류 $BCl_3$ 플라즈마는 GaAs와 AlGaAs의 건식식각에서 우수한 결과를 나타냈었다.

• Journal of Korean Tunnelling and Underground Space Association
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• v.19 no.6
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• pp.1059-1075
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• 2017

The objective of this study was to evaluate the freezing and thawing resistance of the existing drainage system for leakage treatment of underground concrete structures operating in cold regions. The freezing and thawing test was conducted on 4 types of drainage system specimens to evaluate the freezing and thawing resistance of the drainage system. The freezing and thawing resistance was evaluated on 4 types of Hotty-gel, as a waterproofing material, connection methods and on two methods to fix the drainage board with Hotty-gel on the surface of cement concrete specimen. One cycle of the freeze-thaw testing was 48 hours (24 hours of freezing and 24 hours of thawing), and the temperatures of freezing and thawing were at $-18^{\circ}C$ and $10^{\circ}C$, respectively. Among the 4 types of Hotty-gel connection methods, leakage occurred after 28 cycles (8 weeks) of freeze-thawing only in the Hotty-gel connection method with the 'V' groove applied to the corner of the drainage board. No leakage occurred in the 3 types of Hotty-gel connection methods. In two fixing methods, leakage occurred in the method of fixing the drainage board on the cement concrete specimen using the washer, screw and plastic wall plug. Leakage occurred at one point after 10 cycles (3 weeks) of freezing and thawing. After 28 cycles (8 weeks) of freezing and thawing, leakage point increased to 5 points. As time passed, the leak point was not increased, but the amount of leakage was increased at each leak point. The Hotty-gel connection method with cross-sectional diagonal shape was evaluated to be the highest in the production efficiency considering the production time and manufacturing method of the Hotty-gel connection shape. In the construction efficiency considering the construction time and construction method, the fixing method of air nailer, fixed nail and washer was superior to that of the washer, screw and plastic wall plug.