• Title/Summary/Keyword: ultra-sharp tungsten electrode

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Manufacture of an Ultra-Sharp Tungsten Electrode for Field-Emission Electron Beam and Its Beam Characteristics (멀티채널 방식에 의한 초미세 바늘 전극의 제작 및 빔 특성)

  • 임연찬;현정우;김성수;박철우;이종항;강승언
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2004.04a
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    • pp.508-512
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    • 2004
  • An ultra-sharp tungsten electrode for field emission was manufactured by using an electrochemical etching method, and its beam characteristics were investigated. KOH and NaOH were the electrolytes used in this research, and the taper length of the tip varied form 150 $\mu\textrm{m}$ to 250 $\mu\textrm{m}$ according to the applied voltage and the concentration of the electrolyte. The electron-beam stability was measured to be within 5% for a total emission current of 5 ${\mu}\textrm{A}$ during 4 hours of operation, and the Ignition voltages were found to be ∼300 V. The tip radius was experimentally found to be 250${\AA}$ from a linear fitting of Fowler-Nordheim plots, which was in remarkably good agreement with that of the image size from scanning ion-microscopy.

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