• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.249-250
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• 2007

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.1-2
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• 2007

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.74-78
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• 2002

Ultra-Precision CNC polishing system including on-machine measurement system, a corrective polishing algorithm is developed. The unit removal profiles for various polishing tools and analyzed and tested and dwell time distributions and residual errors for a target removal shape are calculated. The corrective polishing algorithm is tested with various workpieces. This result will be used for the software development of the CNC polishing system.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.759-760
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• 2011

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.211-212
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• 2011

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.865-869
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• 1997

In recent years, there has been increasing demand of ultra-fine grain graded cemented tungsten carbide material with high hardness and toughness which is used as high speed cutting tool for development in semiconductor, electronics and die/mold industry, which bring into limelight high-precision, high-efficient machining of sculptured surfaces. This paper deals with the performance of variation in the ultra-fine grain graded cemented tungsten carbide material such as grain size, hardness and density varied according to the volume of added elements, Co or TaC, and he changing of mixing, sintering process. Also, the performance of developing material with uniformed grain size of 0.5${\mu}{\textrm}{m}$ is compared with other domestics' & foreign companies' with analyzing and cutting performance testing.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.4
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• pp.143-150
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• 2003

Frictional properties of ultra-thin carbon coatings on silicon wafer were investigated based on Taguchi experimental design method. Sensitivity analysis was performed with normal load, relative humidity, deposition process, and coating thickness as the variables. It was found that despite low thickness, the carbon coating resulted in relatively low friction coefficient. Also, the frictional behavior was affected significantly by humidity and normal load.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.623-624
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• 2005

Micro injection molding is a branch of micro system technology and has been under development for the mass manufacture of micro parts. Enhanced technological products like micro optical devices are entering the market. This paper presents fundamental research on the injection molding technique in micro fabrication. In order to successful manufacturing of micro plastic parts, it is necessary to research for development of micro-injection machine, machining of micro mold, decision of optimum injection conditions and the research for polymer material. Therefore in this study, in order to machining of micro mold, a mold core with microscopic V-shaped groove was tooled by ultra-precise tooling machine. The transcription experiments with a polymer, PMMA resin on the surface of core with Ni plating were carried out and surface profile of injected parts was measured with AFM.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.912-915
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• 2004

A vacuum environment is very important for NGL(Next Generation Lithography) apparatuses such as EUVL(Extreme Ultra Violet Lithography) or EPL(Electron Projection Lithography) and so on. The performance of these systems is dominated by vacuum level of processing and positioning accuracy of a stage. So, ultra-precision stage usable in a high vacuum level is needed for the improved performance of these devices. In contrast to atmospheric condition, a special attention must be paid to guide bearing, actuator and other elements. In this paper, air bearing is adopted because of its very high motional accuracy. So, air bearing is designed to be vacuum compatible using differential exhaust method, which prevents air from entering into vacuum chamber. For this, leakage analysis is performed theoretically and verified from experiment.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2001.04a
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• pp.263-268
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• 2001

The needs for precision machining of micro to milli parts have been increased as the industry require high quality products, especially for the micro-machining of IT products. The ultra-precision machining system is essential for the micro machining of fine structures, which insures machining accuracy, low systematic and random error and repeatability. In this study, we developed micro machining system, which is equipped with air bearing stage for ultra precision machining and also we present the results of V-grooving experiments, conducted by the developed system, to verify the performance of system. The results show that the machined V-grooving had good accuracy with repeatable stability.