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Friction Properties of Carbon Coated Ultra-thin Film using Taguchi Experimental Design  

안준양 (연세대학교 대학원 기계공학과)
김대은 (연세대학교 기계공학부)
최진용 (한국과학기술연구원 미래기술연구본부 나노소자연구센터)
신경호 (한국과학기술연구원 미래기술연구본부 나노소자연구센터)
Publication Information
Journal of the Korean Society for Precision Engineering / v.20, no.4, 2003 , pp. 143-150 More about this Journal
Abstract
Frictional properties of ultra-thin carbon coatings on silicon wafer were investigated based on Taguchi experimental design method. Sensitivity analysis was performed with normal load, relative humidity, deposition process, and coating thickness as the variables. It was found that despite low thickness, the carbon coating resulted in relatively low friction coefficient. Also, the frictional behavior was affected significantly by humidity and normal load.
Keywords
Deposition condition; Relative humidity; Taguchi experimental design; Ultra-thin carbon coating film;
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Times Cited By KSCI : 4  (Citation Analysis)
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